Problem karlsuss SNF 2005-03-28 18:13:10: inconsistent exposure result

martinez at snf.stanford.edu martinez at snf.stanford.edu
Tue Mar 29 11:11:12 PST 2005


cleaned ellipsoidal mirror
calibrated lamp, set up grab z
cycled 3 resolution wafers
exposure is good at 1.0um across the wafer




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