Comment karlsuss SNF 2005-03-29 20:11:19: possible WEC problem?

yeh at snf.stanford.edu yeh at snf.stanford.edu
Tue Mar 29 20:11:20 PST 2005

Previous message: Problem karlsuss SNF 2005-03-28 18:13:10: inconsistent exposure result
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couldn't focus on both mask and wafer while in contact.  seems worse for left microscope.  2um features did not resolve as a result.

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