From vilanova at snf.stanford.edu Mon May 2 07:55:30 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 2 May 2005 07:55:30 -0700 Subject: Problem karlsuss SNF 2005-04-30 23:09:38: backside microscope is not moving Message-ID: User moved the micrometer way too far, I moved it back to center position , tested wafer , ok to use. From paclifton at snf.stanford.edu Wed May 4 19:59:53 2005 From: paclifton at snf.stanford.edu (paclifton at snf.stanford.edu) Date: Wed, 4 May 2005 19:59:53 -0700 Subject: Problem karlsuss SNF 2005-05-04 19:59:53: machine locked up Message-ID: locked up around 7:30PM. Unable to change mask or raise microscope From vilanova at snf.stanford.edu Thu May 5 07:41:13 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 May 2005 07:41:13 -0700 Subject: Problem karlsuss SNF 2005-05-04 19:59:53: machine locked up Message-ID: Initialized MIcroscope, tested a few times , working fine , ready to use. :-) From mahnaz at snf.stanford.edu Thu May 5 14:34:39 2005 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 5 May 2005 14:34:39 -0700 Subject: Shutdown karlsuss SNF 2005-05-05 14:34:38: it might be the power supply Message-ID: I will call KS to get info From martinez at snf.stanford.edu Fri May 6 10:39:07 2005 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 6 May 2005 10:39:07 -0700 Subject: Shutdown karlsuss SNF 2005-05-05 14:34:38: it might be the power supply Message-ID: reset lamp power supply, reseated all cables installed duv & 365 lamps and checked intensity both lamps are in spec. From vilanova at snf.stanford.edu Fri May 13 10:06:54 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 13 May 2005 10:06:54 -0700 Subject: Comment karlsuss SNF 2005-05-13 10:06:53: Back To normal Mode 365 Nm Message-ID: System Back to normal MOde 365 Nm , Lamp Calibrated, Deep UV users finished early this time , ok to use. From vilanova at snf.stanford.edu Fri May 20 10:10:44 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 20 May 2005 10:10:44 -0700 Subject: Comment karlsuss SNF 2005-05-20 10:10:43: Back to normal mode 365Nm Message-ID: Deep UV users Finished early today , back to normal mode 365 Nm/ 350Watts lamp, lamp calibrated , ready to use. From vilanova at snf.stanford.edu Thu May 26 09:58:16 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 26 May 2005 09:58:16 -0700 Subject: Comment karlsuss SNF 2005-05-26 09:58:15: System Under deep UV mode Message-ID: System Under deep UV Mode , until 5/27/05 From vilanova at snf.stanford.edu Fri May 27 08:12:19 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 27 May 2005 08:12:19 -0700 Subject: Comment karlsuss SNF 2005-05-27 08:12:17: System back to normal mode Message-ID: System back to normal mode , ready to use.