From latta at snf.stanford.edu Thu Nov 3 16:46:48 2005 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 3 Nov 2005 16:46:48 -0800 Subject: Problem karlsuss SNF 2005-11-03 16:46:47: resolution not good Message-ID: My wafers look very much like the ones coming out of KS2- all squiggly. Verified mask is ok. From vilanova at snf.stanford.edu Fri Nov 4 07:56:56 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Nov 2005 07:56:56 -0800 Subject: Problem karlsuss SNF 2005-11-03 16:46:47: resolution not good Message-ID: Exposed a wafer ( Using mahnaz resolution mask ) ,resolution is good, could not repeat the problem , ok to use. From vilanova at snf.stanford.edu Tue Nov 15 09:35:35 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Nov 2005 09:35:35 -0800 Subject: Comment karlsuss SNF 2005-11-15 09:35:35: Deep UV mode Message-ID: Systerm Under deep UV Mode from 10Am until; 2:30Pm today 11/15/05 From vilanova at snf.stanford.edu Tue Nov 15 09:35:59 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Nov 2005 09:35:59 -0800 Subject: Comment karlsuss SNF 2005-09-29 09:49:47: Deep UV Mode Message-ID: Cleared comment. From vilanova at snf.stanford.edu Tue Nov 15 09:36:09 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Nov 2005 09:36:09 -0800 Subject: Comment karlsuss SNF 2005-09-29 14:15:38: Sytem Back to normal mode 365Nm/Cm2 Message-ID: Cleared comment. From vilanova at snf.stanford.edu Tue Nov 15 09:36:20 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Nov 2005 09:36:20 -0800 Subject: Comment karlsuss SNF 2005-10-06 09:47:54: Deep UV Mode Message-ID: Cleared comment. From vilanova at snf.stanford.edu Tue Nov 15 14:24:19 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Nov 2005 14:24:19 -0800 Subject: Comment karlsuss SNF 2005-11-15 14:24:18: Back to normal mode Message-ID: Lamp changed , back to normal mode 365Nm/Cm2 Lamp calibrated, ready to use. From vilanova at snf.stanford.edu Tue Nov 22 14:28:38 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Nov 2005 14:28:38 -0800 Subject: Comment karlsuss SNF 2005-11-22 14:28:37: Deep UV Mode Message-ID: WE ARE SWITCHING TO DEEP UV MODE TOMORROW FROM 10:00AM TO 1:30PM ( PER A USER REQUEST) WE ARE CHANGING BACK TO NORMAL MODE AFTER 1:30PM ( 11/23/05) From vilanova at snf.stanford.edu Wed Nov 23 10:17:05 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Nov 2005 10:17:05 -0800 Subject: Comment karlsuss SNF 2005-11-23 10:16:58: system Under deep Uv mode until 2:00PM Message-ID: From vilanova at snf.stanford.edu Wed Nov 23 14:17:19 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 23 Nov 2005 14:17:19 -0800 Subject: Comment karlsuss SNF 2005-11-23 14:17:19: Back to normal mode 365Nm/Cm2 Message-ID: back to normal Mode 365Nm/Cm2 , New lamp, calibrated and tested , ready to use. From vilanova at snf.stanford.edu Tue Nov 29 09:49:04 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:49:04 -0800 Subject: Comment karlsuss SNF 2005-10-06 14:20:12: Back To normal Mode Message-ID: Comment Cleared. From vilanova at snf.stanford.edu Tue Nov 29 09:49:16 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:49:16 -0800 Subject: Comment karlsuss SNF 2005-10-11 09:52:28: System Under deep UV today! Message-ID: Comment Cleared. From vilanova at snf.stanford.edu Tue Nov 29 09:50:33 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:50:33 -0800 Subject: Comment karlsuss SNF 2005-11-29 09:50:32: System Under Deep UV Mode Message-ID: System Under Deep UV mode Until this afternoon ( 11/29/05) From vilanova at snf.stanford.edu Tue Nov 29 09:50:56 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:50:56 -0800 Subject: Comment karlsuss SNF 2005-10-11 14:27:58: back to normal mode 365Nm/Cm2 Message-ID: Cleared comment From vilanova at snf.stanford.edu Tue Nov 29 09:51:09 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:51:09 -0800 Subject: Comment karlsuss SNF 2005-10-18 09:54:58: System Under Deep UV mode Message-ID: Cleared Comment. From vilanova at snf.stanford.edu Tue Nov 29 09:51:22 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:51:22 -0800 Subject: Comment karlsuss SNF 2005-10-18 14:36:04: system back to normal mode 365nm/cm2 Message-ID: CLEARED COMMENT. From vilanova at snf.stanford.edu Tue Nov 29 09:51:33 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:51:33 -0800 Subject: Comment karlsuss SNF 2005-10-25 09:13:58: DEEP UV USERS Message-ID: Cleared comment. From vilanova at snf.stanford.edu Tue Nov 29 09:51:44 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:51:44 -0800 Subject: Comment karlsuss SNF 2005-10-25 10:35:19: No deep UV Today Message-ID: cleared comment. From vilanova at snf.stanford.edu Tue Nov 29 09:51:57 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:51:57 -0800 Subject: Comment karlsuss SNF 2005-11-15 09:35:35: Deep UV mode Message-ID: cleared comment. From vilanova at snf.stanford.edu Tue Nov 29 09:52:10 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:52:10 -0800 Subject: Comment karlsuss SNF 2005-11-15 14:24:18: Back to normal mode Message-ID: cleared comment . From vilanova at snf.stanford.edu Tue Nov 29 09:52:20 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:52:20 -0800 Subject: Comment karlsuss SNF 2005-11-22 14:28:37: Deep UV Mode Message-ID: Cleared. From vilanova at snf.stanford.edu Tue Nov 29 09:52:28 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:52:28 -0800 Subject: Comment karlsuss SNF 2005-11-23 10:16:58: system Under deep Uv mode until 2:00PM Message-ID: Cleared. From vilanova at snf.stanford.edu Tue Nov 29 09:52:49 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 09:52:49 -0800 Subject: Comment karlsuss SNF 2005-11-23 14:17:19: Back to normal mode 365Nm/Cm2 Message-ID: uffff! the last one!!! cleared!!! :-) From vilanova at snf.stanford.edu Tue Nov 29 14:15:29 2005 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Nov 2005 14:15:29 -0800 Subject: Comment karlsuss SNF 2005-11-29 14:15:28: back to normal mode Message-ID: back to normal mode , lamp calibrated , ready to use.