From vilanova at snf.stanford.edu Tue Aug 1 07:16:38 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Aug 2006 07:16:38 -0700 Subject: Problem karlsuss SNF 2006-07-31 21:23:00: Wafer vacuum hose impeding movement of wafer slide Message-ID: adjusted wafer chuck slider cable, tested ok, ready to use. From vilanova at snf.stanford.edu Tue Aug 1 07:18:10 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 1 Aug 2006 07:18:10 -0700 Subject: Shutdown karlsuss SNF 2006-07-31 23:56:26: Interface keeps resetting Message-ID: FOund Thetha out of range Initialized Tetha motor, tested a couple o ftimes , ready to use. From vilanova at snf.stanford.edu Fri Aug 4 06:31:27 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Aug 2006 06:31:27 -0700 Subject: Shutdown karlsuss SNF 2006-08-04 06:31:27: Monthly Lamp change Message-ID: From vilanova at snf.stanford.edu Fri Aug 4 07:54:56 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 4 Aug 2006 07:54:56 -0700 Subject: Shutdown karlsuss SNF 2006-08-04 06:31:27: Monthly Lamp change Message-ID: Monthly Lamp Completed, replaced lamp , cleaned Ellipsoidal mirror and Cold Mirror, Uniformity 2.0 % , Ready to use. From beinn at snf.stanford.edu Tue Aug 15 09:40:58 2006 From: beinn at snf.stanford.edu (beinn at snf.stanford.edu) Date: Tue, 15 Aug 2006 09:40:58 -0700 Subject: Problem karlsuss SNF 2006-08-15 09:40:57: Wafer stuck to chuck Message-ID: Exposing wafer with hard contact resulted in wafer becoming stuck to mask. Have run the same process before without problems. From vilanova at snf.stanford.edu Tue Aug 15 09:41:10 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Aug 2006 09:41:10 -0700 Subject: Comment karlsuss SNF 2006-08-15 09:41:09: System Under deep UV mode Until 2:30Pm today 8/15/06 Message-ID: From vilanova at snf.stanford.edu Tue Aug 15 09:42:14 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Aug 2006 09:42:14 -0700 Subject: Problem karlsuss SNF 2006-08-15 09:40:57: Wafer stuck to chuck Message-ID: checked vacuum pressure , initialized system and tested , ready to use. From vilanova at snf.stanford.edu Tue Aug 15 14:51:07 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 15 Aug 2006 14:51:07 -0700 Subject: Comment karlsuss SNF 2006-08-15 14:51:07: system back to normal mode 365Nm/Cm2 Message-ID: System back to normal mode 365Nm?cm2 Lamp calibrated INTENSITY 15MW/CM2 UNIFORMITY = 2.80% READY TO USE. From uyoon at snf.stanford.edu Tue Aug 29 08:57:51 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Tue, 29 Aug 2006 08:57:51 -0700 Subject: Shutdown karlsuss SNF 2006-08-29 08:57:50: theta knob is not working to correct the over current status. Message-ID: From vilanova at snf.stanford.edu Tue Aug 29 09:13:16 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Aug 2006 09:13:16 -0700 Subject: Comment karlsuss SNF 2006-08-15 09:41:09: System Under deep UV mode Until 2:30Pm today 8/15/06 Message-ID: cleared comment. From vilanova at snf.stanford.edu Tue Aug 29 09:13:27 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Aug 2006 09:13:27 -0700 Subject: Comment karlsuss SNF 2006-08-15 14:51:07: system back to normal mode 365Nm/Cm2 Message-ID: cleared comment. From vilanova at snf.stanford.edu Tue Aug 29 09:14:17 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Aug 2006 09:14:17 -0700 Subject: Shutdown karlsuss SNF 2006-08-29 08:57:50: theta knob is not working to correct the over current status. Message-ID: adjusted theta KNOB , OK TO USE, BY THE WAY WE HAVE DEEP UV TODAY FROM 9AM TO 300PM 8/29/06 From vilanova at snf.stanford.edu Tue Aug 29 14:40:01 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 29 Aug 2006 14:40:01 -0700 Subject: Comment karlsuss SNF 2006-08-29 14:40:00: lamp back to normal mode 365nm/cm2 Message-ID: lamp back to normal mode 365Nm/Cm2 , lamp calibrated intensity 15mw/Cm2 Uniformity 2.08% ready to use.