From rcrane at snf.stanford.edu Thu Feb 2 09:27:55 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Thu, 2 Feb 2006 09:27:55 -0800 Subject: Problem karlsuss SNF 2006-02-02 09:27:54: High humidity today Message-ID: tower water system is down From vilanova at snf.stanford.edu Thu Feb 2 09:30:11 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Feb 2006 09:30:11 -0800 Subject: Shutdown karlsuss SNF 2006-02-02 09:30:11: lamp change in progress...... Message-ID: From vilanova at snf.stanford.edu Thu Feb 2 10:48:29 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Feb 2006 10:48:29 -0800 Subject: Shutdown karlsuss SNF 2006-02-02 09:30:11: lamp change in progress...... Message-ID: lamp chang completed, ok to use From rcrane at snf.stanford.edu Thu Feb 2 13:37:14 2006 From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu) Date: Thu, 2 Feb 2006 13:37:14 -0800 Subject: Problem karlsuss SNF 2006-02-02 09:27:54: High humidity today Message-ID: Cooling water restored. Dick From ianchan at snf.stanford.edu Sat Feb 4 17:14:58 2006 From: ianchan at snf.stanford.edu (ianchan at snf.stanford.edu) Date: Sat, 4 Feb 2006 17:14:58 -0800 Subject: Problem karlsuss SNF 2006-02-04 17:14:57: stuck on please wait Message-ID: machine was stuck on "please wait" message when I got here. needs rebooting. From vilanova at snf.stanford.edu Mon Feb 6 07:14:53 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Feb 2006 07:14:53 -0800 Subject: Problem karlsuss SNF 2006-02-04 17:14:57: stuck on please wait Message-ID: Adjusted microscope position , initialized , tested, ready to use. From vilanova at snf.stanford.edu Tue Feb 7 09:28:01 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 7 Feb 2006 09:28:01 -0800 Subject: Comment karlsuss SNF 2006-02-07 09:28:01: Deep UV mode Message-ID: Deep UV mode from 9:30Am to 3:00PM 2/7/06 From vilanova at snf.stanford.edu Tue Feb 7 15:22:27 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 7 Feb 2006 15:22:27 -0800 Subject: Comment karlsuss SNF 2006-02-07 15:22:26: Back to normal mode 365Nm/Cm2 Message-ID: From vilanova at snf.stanford.edu Thu Feb 9 10:37:53 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:37:53 -0800 Subject: Comment karlsuss SNF 2006-01-05 10:06:00: System Under Deep UV mode . Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Feb 9 10:38:02 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:38:02 -0800 Subject: Comment karlsuss SNF 2006-01-05 15:10:46: back to normal mode Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Feb 9 10:38:09 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:38:09 -0800 Subject: Comment karlsuss SNF 2006-01-12 07:13:10: System Under Deep UV Mode. Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Feb 9 10:38:18 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:38:18 -0800 Subject: Comment karlsuss SNF 2006-01-12 13:35:42: Deep UV MOde Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Feb 9 10:38:27 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:38:27 -0800 Subject: Comment karlsuss SNF 2006-01-13 09:13:36: Back To normal Mode Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Feb 9 10:38:35 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:38:35 -0800 Subject: Comment karlsuss SNF 2006-02-07 09:28:01: Deep UV mode Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Feb 9 10:38:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Feb 2006 10:38:43 -0800 Subject: Comment karlsuss SNF 2006-02-07 15:22:26: Back to normal mode 365Nm/Cm2 Message-ID: Cleared. From vilanova at snf.stanford.edu Tue Feb 14 07:55:27 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 14 Feb 2006 07:55:27 -0800 Subject: Comment karlsuss SNF 2006-02-14 07:55:26: System under deep UV Mode. Message-ID: System Under Deep UV MOde from 8:00Am to 3:00PM 2/14/06 From vilanova at snf.stanford.edu Wed Feb 15 07:36:52 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 15 Feb 2006 07:36:52 -0800 Subject: Comment karlsuss SNF 2006-02-15 07:36:51: System back to normal Mode Message-ID: System back to normal mode 365Nm/Cm2 Ready to use. From vilanova at snf.stanford.edu Wed Feb 22 14:29:03 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 22 Feb 2006 14:29:03 -0800 Subject: Comment karlsuss SNF 2006-02-22 14:29:03: Back to normal Mode 365Nm/Cm2 Message-ID: From mjarrahi at snf.stanford.edu Sat Feb 25 21:17:34 2006 From: mjarrahi at snf.stanford.edu (mjarrahi at snf.stanford.edu) Date: Sat, 25 Feb 2006 21:17:34 -0800 Subject: Problem karlsuss SNF 2006-02-25 21:17:33: equipment hanged while exposing Message-ID: From vilanova at snf.stanford.edu Mon Feb 27 07:41:50 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Feb 2006 07:41:50 -0800 Subject: Problem karlsuss SNF 2006-02-25 21:17:33: equipment hanged while exposing Message-ID: Found system stalled , removed mask and wafer from system , initialized systrem ,ok to use. From vilanova at snf.stanford.edu Tue Feb 28 09:24:50 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Feb 2006 09:24:50 -0800 Subject: Comment karlsuss SNF 2006-02-28 09:24:48: Lamp under deep UV mode Message-ID: Deep UV mode until 2:30Pm 2/2/8/06 From vilanova at snf.stanford.edu Tue Feb 28 14:26:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Feb 2006 14:26:44 -0800 Subject: Comment karlsuss SNF 2006-02-28 14:26:43: System back to normal Mode 365Nm/Cm2 Message-ID: