From vilanova at snf.stanford.edu Thu Jan 5 10:02:10 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 10:02:10 -0800 Subject: Comment karlsuss SNF 2005-11-29 09:50:32: System Under Deep UV Mode Message-ID: Cleared Comment. From vilanova at snf.stanford.edu Thu Jan 5 10:02:21 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 10:02:21 -0800 Subject: Comment karlsuss SNF 2005-11-29 14:15:28: back to normal mode Message-ID: Cleared Comment. From vilanova at snf.stanford.edu Thu Jan 5 10:02:33 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 10:02:33 -0800 Subject: Comment karlsuss SNF 2005-12-06 10:27:15: deep uv mode Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Jan 5 10:05:07 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 10:05:07 -0800 Subject: Comment karlsuss SNF 2005-12-07 10:03:50: back to normal mode Message-ID: cleared. From vilanova at snf.stanford.edu Thu Jan 5 10:05:17 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 10:05:17 -0800 Subject: Comment karlsuss SNF 2005-12-13 08:53:32: deep uv mode Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Jan 5 10:05:25 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 10:05:25 -0800 Subject: Comment karlsuss SNF 2005-12-13 14:49:51: back to normal mode 365Nm/Cm2 Message-ID: Cleared. From vilanova at snf.stanford.edu Thu Jan 5 10:06:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 10:06:00 -0800 Subject: Comment karlsuss SNF 2006-01-05 10:06:00: System Under Deep UV mode . Message-ID: System Under Deep UV mode until 3:00pm 1/5/06 From vilanova at snf.stanford.edu Thu Jan 5 15:10:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 5 Jan 2006 15:10:46 -0800 Subject: Comment karlsuss SNF 2006-01-05 15:10:46: back to normal mode Message-ID: back to normal mode, 365Nm/Cm2 , ok to use From crichter at snf.stanford.edu Thu Jan 5 16:41:58 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Thu, 5 Jan 2006 16:41:58 -0800 Subject: Problem karlsuss SNF 2006-01-05 16:41:58: 20x objectives hazy Message-ID: I can't get both the alignment marks to be in focus with the alignment marks on the photomask in contact mode. If I focus on the mask alignment marks, the markers on the wafer goes out of focus...and vice versa. 10x and 5x looks good From martinez at snf.stanford.edu Fri Jan 6 09:31:53 2006 From: martinez at snf.stanford.edu (martinez at snf.stanford.edu) Date: Fri, 6 Jan 2006 09:31:53 -0800 Subject: Problem karlsuss SNF 2006-01-05 16:41:58: 20x objectives hazy Message-ID: loaded and exposed resolution test mask/wafer developed, loaded on chuck & focused on 2.5um feature both mask & wafer featurres are in focus @ 20x contact mode could not duplicate prob From vilanova at snf.stanford.edu Thu Jan 12 07:13:11 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 12 Jan 2006 07:13:11 -0800 Subject: Comment karlsuss SNF 2006-01-12 07:13:10: System Under Deep UV Mode. Message-ID: The System Will be under deep UV mode today 1/12/06 Until 3:00pm . From vilanova at snf.stanford.edu Thu Jan 12 13:35:43 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 12 Jan 2006 13:35:43 -0800 Subject: Comment karlsuss SNF 2006-01-12 13:35:42: Deep UV MOde Message-ID: The System Will be Under Deep UV mode Until tomorrow morning 8:ooAM , 1/13/06 . From vilanova at snf.stanford.edu Fri Jan 13 09:13:40 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 13 Jan 2006 09:13:40 -0800 Subject: Comment karlsuss SNF 2006-01-13 09:13:36: Back To normal Mode Message-ID: Back To normal Mode 365Nm/Cm2 Lamp Calibrated, ready to use. From pethe at snf.stanford.edu Mon Jan 16 19:17:51 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Mon, 16 Jan 2006 19:17:51 -0800 Subject: Problem karlsuss SNF 2006-01-16 19:17:51: no vaccuum on mask holder Message-ID: From vilanova at snf.stanford.edu Tue Jan 17 06:58:48 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Jan 2006 06:58:48 -0800 Subject: Problem karlsuss SNF 2006-01-16 19:17:51: no vaccuum on mask holder Message-ID: Vacuum Holder working fine , user probably forgot to ENABLE it , Ready to use. From kenney at snf.stanford.edu Wed Jan 25 12:10:01 2006 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Wed, 25 Jan 2006 12:10:01 -0800 Subject: Problem karlsuss SNF 2006-01-25 12:10:00: Grab Image shakes Message-ID: After using the Grab Image function, the captured image shakes From vilanova at snf.stanford.edu Wed Jan 25 13:41:18 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Jan 2006 13:41:18 -0800 Subject: Problem karlsuss SNF 2006-01-25 12:10:00: Grab Image shakes Message-ID: Checked grab Image, system working fine , I couldnt duplicate the problem, ok to use.