From vilanova at snf.stanford.edu Wed Jul 5 10:07:51 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jul 2006 10:07:51 -0700 Subject: Comment karlsuss SNF 2006-07-05 10:07:51: deep UV mode until 3:00Pm today 7/4/06 Message-ID: From vilanova at snf.stanford.edu Wed Jul 5 15:05:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 5 Jul 2006 15:05:46 -0700 Subject: Comment karlsuss SNF 2006-07-05 15:05:45: system back to normal mode 365Nm?cm2 READY TO USE. Message-ID: From johnchoi at snf.stanford.edu Fri Jul 14 17:52:50 2006 From: johnchoi at snf.stanford.edu (johnchoi at snf.stanford.edu) Date: Fri, 14 Jul 2006 17:52:50 -0700 Subject: Problem karlsuss SNF 2006-07-14 17:52:49: Error message, not responding Message-ID: Screen says "Ready for start-->Press LOAD button". Placed mask on mask holder, slid it into the grooves, pressed LOAD button. Screen says: WATCH OUT ! -- OVERCURRENT - Can not continue Z-AXIS/ Doesn't respond. Pressing Select Program, Enter seems to do something, but same thing happens again. From vilanova at snf.stanford.edu Mon Jul 17 07:35:51 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 17 Jul 2006 07:35:51 -0700 Subject: Problem karlsuss SNF 2006-07-14 17:52:49: Error message, not responding Message-ID: Initialized and adjusted Z Axxis, Tested , ok to use. From vilanova at snf.stanford.edu Mon Jul 24 15:08:36 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 24 Jul 2006 15:08:36 -0700 Subject: Comment karlsuss SNF 2006-07-24 15:08:35: NO DEEP UV TOMORROW , SORRY FOR THE LATE NOTICE Message-ID: NO DEEP UV TOMORROW , SORRY FOR THE LATE NOTICE. From vilanova at snf.stanford.edu Tue Jul 25 09:37:14 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 25 Jul 2006 09:37:14 -0700 Subject: Comment karlsuss SNF 2006-07-25 09:37:13: No Deep UV today !!!!!!!! Message-ID: I had reservations for Deep UV today , but they are not going to use it , so I decided to delete my reservations from 9AM to 3:00PM , Sorry for the late notice. From axiu at snf.stanford.edu Tue Jul 25 15:52:43 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Tue, 25 Jul 2006 15:52:43 -0700 Subject: Problem karlsuss SNF 2006-07-25 15:52:42: backside microscope does not move along x direction Message-ID: From axiu at snf.stanford.edu Tue Jul 25 16:03:18 2006 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Tue, 25 Jul 2006 16:03:18 -0700 Subject: Shutdown karlsuss SNF 2006-07-25 16:03:13: not be able to initialize Message-ID: tried to initialize by staff, not pass twice. From vilanova at snf.stanford.edu Wed Jul 26 07:26:07 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:26:07 -0700 Subject: Problem karlsuss SNF 2006-07-25 15:52:42: backside microscope does not move along x direction Message-ID: Initialized system , test BSA MIcroscopes and they both are working FIne, Ready to use. From vilanova at snf.stanford.edu Wed Jul 26 07:26:44 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:26:44 -0700 Subject: Shutdown karlsuss SNF 2006-07-25 16:03:13: not be able to initialize Message-ID: Initialized System Checked BSA Microscopes , Ready to use. From vilanova at snf.stanford.edu Wed Jul 26 07:26:59 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:26:59 -0700 Subject: Comment karlsuss SNF 2006-06-27 15:19:48: System Back to normal MOde 365Nm/Cm2 Message-ID: cleared comment. From vilanova at snf.stanford.edu Wed Jul 26 07:27:10 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:27:10 -0700 Subject: Comment karlsuss SNF 2006-07-05 10:07:51: deep UV mode until 3:00Pm today 7/4/06 Message-ID: cleared comment. From vilanova at snf.stanford.edu Wed Jul 26 07:27:20 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:27:20 -0700 Subject: Comment karlsuss SNF 2006-07-05 15:05:45: system back to normal mode 365Nm?cm2 READY TO USE. Message-ID: Cleared. From vilanova at snf.stanford.edu Wed Jul 26 07:27:27 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:27:27 -0700 Subject: Comment karlsuss SNF 2006-07-24 15:08:35: NO DEEP UV TOMORROW , SORRY FOR THE LATE NOTICE Message-ID: cleared. From vilanova at snf.stanford.edu Wed Jul 26 07:27:35 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 26 Jul 2006 07:27:35 -0700 Subject: Comment karlsuss SNF 2006-07-25 09:37:13: No Deep UV today !!!!!!!! Message-ID: cleared. From me342a at snf.stanford.edu Mon Jul 31 21:23:01 2006 From: me342a at snf.stanford.edu (me342a at snf.stanford.edu) Date: Mon, 31 Jul 2006 21:23:01 -0700 Subject: Problem karlsuss SNF 2006-07-31 21:23:00: Wafer vacuum hose impeding movement of wafer slide Message-ID: Still usable but requires repeated adjustment of the hose. From me342e at snf.stanford.edu Mon Jul 31 23:56:26 2006 From: me342e at snf.stanford.edu (me342e at snf.stanford.edu) Date: Mon, 31 Jul 2006 23:56:26 -0700 Subject: Shutdown karlsuss SNF 2006-07-31 23:56:26: Interface keeps resetting Message-ID: Machine kept rebooting / resetting. Probably due to wafer hose problem.