From mjarrahi at snf.stanford.edu Tue Jun 6 19:38:17 2006 From: mjarrahi at snf.stanford.edu (mjarrahi at snf.stanford.edu) Date: Tue, 6 Jun 2006 19:38:17 -0700 Subject: Shutdown karlsuss SNF 2006-06-06 19:38:17: overcurrent error ! Message-ID: From vilanova at snf.stanford.edu Wed Jun 7 07:22:16 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Jun 2006 07:22:16 -0700 Subject: Shutdown karlsuss SNF 2006-06-06 19:38:17: overcurrent error ! Message-ID: removed Users Mask , Initialized System , Put mask back on Exposed wafers, System Working Fine , Ready to use. From vilanova at snf.stanford.edu Wed Jun 7 14:21:49 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 7 Jun 2006 14:21:49 -0700 Subject: Comment karlsuss SNF 2006-06-07 14:21:48: Deep UV Next tuesday 6/13/06 Message-ID: The system Will be Under deep UV mode Next tuesday 6/13/06 from 9Am to 2:30PM . From vilanova at snf.stanford.edu Tue Jun 13 09:18:15 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 13 Jun 2006 09:18:15 -0700 Subject: Comment karlsuss SNF 2006-06-13 09:18:12: NO deep UV Today!!!!!! Message-ID: I 've talked to some of the Deep UV Users and they have not received their mask yet , and since nobody has call me or email me for deep UV I will not switch it today. Sorry for the late notice . From mahnaz at snf.stanford.edu Thu Jun 15 14:24:58 2006 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Thu, 15 Jun 2006 14:24:58 -0700 Subject: Problem karlsuss SNF 2006-06-15 14:24:51: mask and wafers are sticking Message-ID: From vilanova at snf.stanford.edu Thu Jun 15 14:34:19 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 15 Jun 2006 14:34:19 -0700 Subject: Problem karlsuss SNF 2006-06-15 14:24:51: mask and wafers are sticking Message-ID: cleaned mask holder , initialized system , Adjusted Wec Pressure, tested and exposed wafer , Ok to use. From vilanova at snf.stanford.edu Fri Jun 16 08:43:39 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Jun 2006 08:43:39 -0700 Subject: Comment karlsuss SNF 2006-06-07 14:21:48: Deep UV Next tuesday 6/13/06 Message-ID: System Under Deep UV mode from 8:30Am to 2:00PM Today 6/16/06 From vilanova at snf.stanford.edu Fri Jun 16 08:43:52 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Jun 2006 08:43:52 -0700 Subject: Comment karlsuss SNF 2006-06-13 09:18:12: NO deep UV Today!!!!!! Message-ID: Cleared comment. From vilanova at snf.stanford.edu Fri Jun 16 08:44:10 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Jun 2006 08:44:10 -0700 Subject: Comment karlsuss SNF 2006-06-16 08:44:09: system under deep uv mode today 6/16/06 Message-ID: From vilanova at snf.stanford.edu Fri Jun 16 14:28:17 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 16 Jun 2006 14:28:17 -0700 Subject: Comment karlsuss SNF 2006-06-16 08:44:09: system under deep uv mode today 6/16/06 Message-ID: SYSTEM BACK TO NORMAL MODE 365NM/CM2 MONTHLY LAMP AND CALIBRATION COMPLETED. OK TO USE. UNIFORMITY 0.45% From jimkruger at snf.stanford.edu Fri Jun 16 17:01:57 2006 From: jimkruger at snf.stanford.edu (jimkruger at snf.stanford.edu) Date: Fri, 16 Jun 2006 17:01:57 -0700 Subject: Problem karlsuss SNF 2006-06-16 17:01:56: resist still sticking to mask Message-ID: I tried re-soft bake (60 sec, 90 C hotplate): still got resist sticking to mask every wafer. From vilanova at snf.stanford.edu Mon Jun 19 09:25:51 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 19 Jun 2006 09:25:51 -0700 Subject: Problem karlsuss SNF 2006-06-16 17:01:56: resist still sticking to mask Message-ID: cleaned mask and exposed wafer, COuld not repeat the problem , ok to use. From vilanova at snf.stanford.edu Fri Jun 23 06:34:49 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 23 Jun 2006 06:34:49 -0700 Subject: Comment karlsuss SNF 2006-06-23 06:34:48: Deep UV Next Week Message-ID: System Will Be Under Deep UV Mode On tuesday 6/27/06 From (:30Am to 2:30PM . From vilanova at snf.stanford.edu Tue Jun 27 15:19:49 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Jun 2006 15:19:49 -0700 Subject: Comment karlsuss SNF 2006-06-27 15:19:48: System Back to normal MOde 365Nm/Cm2 Message-ID: System Back to normal mode 365Nm?Cm2 ,ALsonext Week We will have Deep UV On Wednesday the 5th Of July Due to to the 4th of July Holiday. Lamp Calibrated and ready to use. From vilanova at snf.stanford.edu Tue Jun 27 15:20:09 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Jun 2006 15:20:09 -0700 Subject: Comment karlsuss SNF 2006-06-23 06:34:48: Deep UV Next Week Message-ID: cleared Comment