Problem karlsuss SNF 2006-06-16 17:01:56: resist still sticking to mask

jimkruger at snf.stanford.edu jimkruger at snf.stanford.edu
Fri Jun 16 17:01:57 PDT 2006


I tried re-soft bake (60 sec, 90 C hotplate):  still got resist sticking to mask every wafer.




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