From vilanova at snf.stanford.edu Tue May 2 14:47:46 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 2 May 2006 14:47:46 -0700 Subject: Comment karlsuss SNF 2006-05-02 14:47:46: back to nomal mode 365Nm/Cm2 Message-ID: back to normal mode , Monthly lamp completed , calibrated ready to use. From huangzb at snf.stanford.edu Wed May 3 02:48:56 2006 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Wed, 3 May 2006 02:48:56 -0700 Subject: Problem karlsuss SNF 2006-05-03 02:48:55: something wrong with the vaccum of mask Message-ID: My mask dropped twice and broke due to vaccum loss when I turned the mask holder upside down. From vilanova at snf.stanford.edu Wed May 3 06:45:35 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 May 2006 06:45:35 -0700 Subject: Problem karlsuss SNF 2006-05-03 02:48:55: something wrong with the vaccum of mask Message-ID: I could not find NOthing Wrong With the mask Vacuum , Maybe user forgot to enable the system on coral, ok to use. From wangz at snf.stanford.edu Tue May 16 23:35:17 2006 From: wangz at snf.stanford.edu (wangz at snf.stanford.edu) Date: Tue, 16 May 2006 23:35:17 -0700 Subject: Shutdown karlsuss SNF 2006-05-16 23:35:16: Accidently turned off the power Message-ID: From vilanova at snf.stanford.edu Wed May 17 07:06:30 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 May 2006 07:06:30 -0700 Subject: Shutdown karlsuss SNF 2006-05-16 23:35:16: Accidently turned off the power Message-ID: on, ok to use. From vilanova at snf.stanford.edu Wed May 17 07:07:00 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 May 2006 07:07:00 -0700 Subject: Comment karlsuss SNF 2006-04-25 21:44:24: Message-ID: Cleared Comment. From vilanova at snf.stanford.edu Wed May 17 07:07:11 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 May 2006 07:07:11 -0700 Subject: Comment karlsuss SNF 2006-04-25 09:42:25: Deep UV mode today from 10Am to 3:00Pm Message-ID: Cleared Comment. From vilanova at snf.stanford.edu Wed May 17 07:07:24 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 May 2006 07:07:24 -0700 Subject: Comment karlsuss SNF 2006-04-25 14:22:23: system back to normal mode 365Nm/Cm2 Message-ID: cleared comment. From vilanova at snf.stanford.edu Wed May 17 07:07:34 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 May 2006 07:07:34 -0700 Subject: Comment karlsuss SNF 2006-05-02 14:47:46: back to nomal mode 365Nm/Cm2 Message-ID: cleared comment. From crichter at snf.stanford.edu Fri May 26 09:34:06 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 26 May 2006 09:34:06 -0700 Subject: Problem karlsuss SNF 2006-05-26 09:34:05: exposure resolution problems Message-ID: For a couple of days I was trying to get 2.5 microns resolved on silicon wafers. After when these wafers (silicon) are exposed and developed, I noticed that the left side of the wafer didn't resolve 2.5 um, but the center and right side of the wafer looks better. On the first day I did this, no EBR was done. Yesterday I did these exposures with EBR and found no improvement. Anyone having problems with this? or with any other resists recently? From crichter at snf.stanford.edu Fri May 26 09:37:25 2006 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Fri, 26 May 2006 09:37:25 -0700 Subject: Comment karlsuss SNF 2006-05-26 09:37:23: comment from previous post Message-ID: The resist I was using was negative resist (Futurrex) From fatihs at snf.stanford.edu Sat May 27 15:48:05 2006 From: fatihs at snf.stanford.edu (fatihs at snf.stanford.edu) Date: Sat, 27 May 2006 15:48:05 -0700 Subject: Shutdown karlsuss SNF 2006-05-27 15:48:04: Overcurrent Problem Message-ID: It restarts then gives the message : watch out overcurrent can not continue in z axis From vilanova at snf.stanford.edu Tue May 30 07:33:12 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 May 2006 07:33:12 -0700 Subject: Shutdown karlsuss SNF 2006-05-27 15:48:04: Overcurrent Problem Message-ID: Why was the system powered off??? overcurrent only happened when system is turned off , Only Maintenance knows has to bring it back on, please do not power system off ! , Initialized system , restore system settings, ok to use. From vilanova at snf.stanford.edu Tue May 30 07:33:58 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 May 2006 07:33:58 -0700 Subject: Problem karlsuss SNF 2006-05-26 09:34:05: exposure resolution problems Message-ID: could not duplicate the Exposure & resolution Problem , System Good to use. From vilanova at snf.stanford.edu Tue May 30 07:34:22 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 May 2006 07:34:22 -0700 Subject: Comment karlsuss SNF 2006-05-26 09:37:23: comment from previous post Message-ID: read previous Comment / problem cleared.