From vilanova at snf.stanford.edu Mon Nov 6 15:06:52 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 6 Nov 2006 15:06:52 -0800 Subject: Comment karlsuss SNF 2006-11-06 15:06:51: WEC Overcurrent Error Message-ID: the WEC and Z motor are having some itermitent overcurrent problems we are calling Suss Engineering to schelude an Annual PM to WEC. From cvenky at snf.stanford.edu Wed Nov 8 15:31:10 2006 From: cvenky at snf.stanford.edu (cvenky at snf.stanford.edu) Date: Wed, 8 Nov 2006 15:31:10 -0800 Subject: Shutdown karlsuss SNF 2006-11-08 15:31:09: Problem with Z Motor Message-ID: From vilanova at snf.stanford.edu Thu Nov 9 11:41:55 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Nov 2006 11:41:55 -0800 Subject: Comment karlsuss SNF 2006-11-06 15:06:51: WEC Overcurrent Error Message-ID: cleared overcurrent issue replaced lamp and calibrated, ok to use. From vilanova at snf.stanford.edu Thu Nov 9 11:42:37 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Nov 2006 11:42:37 -0800 Subject: Shutdown karlsuss SNF 2006-11-08 15:31:09: Problem with Z Motor Message-ID: Replaced lamp and calibrated , adjusted Z motor and WEC, we'll keep an eye on the wec. From vilanova at snf.stanford.edu Thu Nov 9 11:44:12 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 9 Nov 2006 11:44:12 -0800 Subject: Problem karlsuss SNF 2006-11-09 11:44:11: I will leave it under yellow light Message-ID: I Will leave it under yellow light , just in case the WEC overcurrent erorr come back. From uyoon at snf.stanford.edu Mon Nov 13 16:58:21 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Mon, 13 Nov 2006 16:58:21 -0800 Subject: Comment karlsuss SNF 2006-11-13 16:58:21: Message-ID: Mahnaz said that someone was saying about the microscopes are missing for the backside alignment, but when I tried both Karl-Suss, they are all there. From vilanova at snf.stanford.edu Fri Nov 17 07:38:52 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Nov 2006 07:38:52 -0800 Subject: Comment karlsuss SNF 2006-11-13 16:58:21: Message-ID: From vilanova at snf.stanford.edu Fri Nov 17 07:40:33 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 17 Nov 2006 07:40:33 -0800 Subject: Problem karlsuss SNF 2006-11-09 11:44:11: I will leave it under yellow light Message-ID: Ok I,ve been monitoring the Z motor for the last 2 weeks , the Z motor and wec are working ok now but we will keep an eye on it , Suss Engineer will be here on the 28th to check things out. From vilanova at snf.stanford.edu Mon Nov 20 15:53:23 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 20 Nov 2006 15:53:23 -0800 Subject: Comment karlsuss SNF 2006-11-20 15:53:23: system Under deep UV until tomorrow morning 11/21/06 Message-ID: From vilanova at snf.stanford.edu Tue Nov 21 08:00:18 2006 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 21 Nov 2006 08:00:18 -0800 Subject: Comment karlsuss SNF 2006-11-20 15:53:23: system Under deep UV until tomorrow morning 11/21/06 Message-ID: System Back to normal MOde 365Nm/Cm2 , lamp calibrated system ready to use. From uyoon at snf.stanford.edu Tue Nov 28 16:28:07 2006 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Tue, 28 Nov 2006 16:28:07 -0800 Subject: Comment karlsuss SNF 2006-11-28 16:28:07: Message-ID: FSE from Karl-Suss adjusted WEC and wafer stage rotation knob. Calibrated lamp intensity to 15mW/cm2. Did the exposure test with 1.1 sec on 1um resist and results was very good. 1um lines and spaces are resolved on all 5 locations. The machine is ready to use.