Problem karlsuss SNF 2006-10-27 20:39:08: over current

libei at snf.stanford.edu libei at snf.stanford.edu
Fri Oct 27 20:39:08 PDT 2006


after aligning mask and wafer, and trying to contact them, I found all of the keys on the control panel do not work. a warning on the screen says "over current, can not continue z-axis".




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