From beinn at snf.stanford.edu  Fri Sep  1 13:26:26 2006
From: beinn at snf.stanford.edu (beinn at snf.stanford.edu)
Date: Fri, 1 Sep 2006 13:26:26 -0700
Subject: Comment karlsuss SNF 2006-09-01 13:26:25: X micrometer making a noise when turned
Message-ID: <mailman.937.1357938455.25750.karlsuss-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Fri Sep  1 14:29:14 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 1 Sep 2006 14:29:14 -0700
Subject: Comment karlsuss SNF 2006-09-01 13:26:25: X micrometer making a noise when turned
Message-ID: <mailman.938.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

lubricated X Micrometer, turned in & out a few times, ok
to use. 



From kimsora at snf.stanford.edu  Thu Sep  7 15:41:50 2006
From: kimsora at snf.stanford.edu (kimsora at snf.stanford.edu)
Date: Thu, 7 Sep 2006 15:41:50 -0700
Subject: Problem karlsuss SNF 2006-09-07 15:41:50: problem when unloading the wafer
Message-ID: <mailman.939.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

when unloading the wafer the wafer is stuck to the mask and the chuck is abruplty dropped down leaving some PR on the mask



From vilanova at snf.stanford.edu  Fri Sep  8 08:15:21 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 8 Sep 2006 08:15:21 -0700
Subject: Problem karlsuss SNF 2006-09-07 15:41:50: problem when unloading the wafer
Message-ID: <mailman.940.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

checked WEC could not repeat the problem , System has 
been in use by Mohamed , no problem found , exposed 
wafers, ok to use. 



From vilanova at snf.stanford.edu  Wed Sep 13 13:40:28 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 13 Sep 2006 13:40:28 -0700
Subject: Shutdown karlsuss SNF 2006-09-13 13:40:28: Monthly Lamp change in progress....
Message-ID: <mailman.941.1357938455.25750.karlsuss-pcs@snf.stanford.edu>




From vilanova at snf.stanford.edu  Wed Sep 13 14:22:38 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 13 Sep 2006 14:22:38 -0700
Subject: Comment karlsuss SNF 2006-08-29 14:40:00: lamp back to normal mode 365nm/cm2
Message-ID: <mailman.942.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

comment cleared.



From vilanova at snf.stanford.edu  Wed Sep 13 14:22:49 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 13 Sep 2006 14:22:49 -0700
Subject: Comment karlsuss SNF 2006-08-29 14:40:00: lamp back to normal mode 365nm/cm2
Message-ID: <mailman.943.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

comment cleared.



From vilanova at snf.stanford.edu  Wed Sep 13 14:44:05 2006
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Wed, 13 Sep 2006 14:44:05 -0700
Subject: Shutdown karlsuss SNF 2006-09-13 13:40:28: Monthly Lamp change in progress....
Message-ID: <mailman.944.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

Monthly Lamp change completed, lamp calibrated
uniformity 1.53%
ready to use.