Problem karlsuss SNF 2006-09-07 15:41:50: problem when unloading the wafer

kimsora at snf.stanford.edu kimsora at snf.stanford.edu
Thu Sep 7 15:41:50 PDT 2006


when unloading the wafer the wafer is stuck to the mask and the chuck is abruplty dropped down leaving some PR on the mask




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