From sbasumal at snf.stanford.edu  Tue Apr 17 12:59:29 2007
From: sbasumal at snf.stanford.edu (sbasumal at snf.stanford.edu)
Date: Tue, 17 Apr 2007 12:59:29 -0700
Subject: Problem karlsuss SNF 2007-04-17 12:59:27: Exposure Times
Message-ID: <mailman.987.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

For PR of 1 um ( with EBR), we had to go upto 1.4/1.5 secs and even then the wafers were slighty underexposed.
It would help to know if the problem has been fixed before Wed morning because if its not   we will know might have to go to even higher exposure times.
 for E341 class.



From gsosa at snf.stanford.edu  Wed Apr 18 07:45:15 2007
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 18 Apr 2007 07:45:15 -0700
Subject: Problem karlsuss SNF 2007-04-17 12:59:27: Exposure Times
Message-ID: <mailman.988.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

Cleaned the elipsoidal mirror. calibrated lamp for 15 mw/cm2on channel 2. checked uniformity(3.2%). system readu to use.  



From jprovine at snf.stanford.edu  Fri Apr 27 12:24:33 2007
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Fri, 27 Apr 2007 12:24:33 -0700
Subject: Problem karlsuss SNF 2007-04-27 12:24:32: lamp not turning on
Message-ID: <mailman.989.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

lamp is in stand by and won't turn on for exposure or lamptest.



From vilanova at snf.stanford.edu  Fri Apr 27 13:33:15 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 27 Apr 2007 13:33:15 -0700
Subject: Problem karlsuss SNF 2007-04-27 12:24:32: lamp not turning on
Message-ID: <mailman.990.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

Lamp was turned off due to a power glitch , Initialized lamp
and calibrated, ok to use. 



From vilanova at snf.stanford.edu  Fri Apr 27 13:33:30 2007
From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu)
Date: Fri, 27 Apr 2007 13:33:30 -0700
Subject: Comment karlsuss SNF 2007-03-29 15:35:41: Suss#1
Message-ID: <mailman.991.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

cleared comment. 



From uyoon at snf.stanford.edu  Mon Apr 30 13:28:57 2007
From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu)
Date: Mon, 30 Apr 2007 13:28:57 -0700
Subject: Comment karlsuss SNF 2007-04-30 13:28:56: 
Message-ID: <mailman.992.1357938455.25750.karlsuss-pcs@snf.stanford.edu>

focus problem on left side microscope for  topside alignment.



From uyoon at snf.stanford.edu  Mon Apr 30 13:29:39 2007
From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu)
Date: Mon, 30 Apr 2007 13:29:39 -0700
Subject: Problem karlsuss SNF 2007-04-30 13:29:39: read previous message.
Message-ID: <mailman.993.1357938455.25750.karlsuss-pcs@snf.stanford.edu>