Problem karlsuss SNF 2007-04-17 12:59:27: Exposure Times

sbasumal at snf.stanford.edu sbasumal at snf.stanford.edu
Tue Apr 17 12:59:29 PDT 2007


For PR of 1 um ( with EBR), we had to go upto 1.4/1.5 secs and even then the wafers were slighty underexposed.
It would help to know if the problem has been fixed before Wed morning because if its not   we will know might have to go to even higher exposure times.
 for E341 class.




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