From vilanova at snf.stanford.edu Thu Aug 2 08:07:10 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 2 Aug 2007 08:07:10 -0700 Subject: Problem karlsuss SNF 2007-07-28 11:48:42: system frozen Message-ID: System seems to be ok , we have been checking it for the last three days and everything Looks normal , ready to use. From beinn at snf.stanford.edu Tue Aug 7 18:57:44 2007 From: beinn at snf.stanford.edu (beinn at snf.stanford.edu) Date: Tue, 7 Aug 2007 18:57:44 -0700 Subject: Problem karlsuss SNF 2007-08-07 18:57:44: Uneven exposure on vac Message-ID: Ran two wafers with 1um 3612 on vac. Got very poor uniformity esp at the edges. Could not really resolve the 1.5um lines and 2um squares. From jparker at snf.stanford.edu Wed Aug 8 09:57:09 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 8 Aug 2007 09:57:09 -0700 Subject: Problem karlsuss SNF 2007-08-08 09:57:08: Low exposure confirmed Message-ID: 3612, 1 um resist---vac. 1 sec leaves visible underexposure 1" around edge. 3612, 1.6 um resist---vac. 1.4 sec. leaves underexposure 1" around edge. 220-7, 7um resist---vac 3.0x2 sec. leaves underexposure 1" arournd edge. From jparker at snf.stanford.edu Wed Aug 8 10:00:48 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 8 Aug 2007 10:00:48 -0700 Subject: Shutdown karlsuss SNF 2007-08-08 10:00:47: Maintenance changing lamp Message-ID: Low exposure reported in the evening confirmed, maintenance needs to change lamp right away. From gsosa at snf.stanford.edu Wed Aug 8 11:12:21 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Aug 2007 11:12:21 -0700 Subject: Shutdown karlsuss SNF 2007-08-08 10:00:47: Maintenance changing lamp Message-ID: Checked intensity- 10.4 Mw. Replaced the UV lamp. Peaked lamp with X/Y/Z knobs. Calibrated channel 2 for 15mw. System ready for use. GS From jparker at snf.stanford.edu Wed Aug 8 11:38:07 2007 From: jparker at snf.stanford.edu (jparker at snf.stanford.edu) Date: Wed, 8 Aug 2007 11:38:07 -0700 Subject: Comment karlsuss SNF 2007-08-08 11:38:06: 3612 clears normally now Message-ID: Maintanence took care of lamp. 1 um thick 3612 clears at 1.0 sec (vacuum) now. Lines and spaces resolution to be checked when time allows/microscopes free up (this will be in logbook rather than in a comment when done). From gsosa at snf.stanford.edu Wed Aug 8 14:53:04 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:53:04 -0700 Subject: Problem karlsuss SNF 2007-08-07 18:57:44: Uneven exposure on vac Message-ID: Replaced and set up UV lamp. System OK to use. GS From gsosa at snf.stanford.edu Wed Aug 8 14:54:05 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Aug 2007 14:54:05 -0700 Subject: Problem karlsuss SNF 2007-08-08 09:57:08: Low exposure confirmed Message-ID: Replaced and set up UV lamp. Calibrated power supply to 15mj/cm2. System OK to use. GS From karthikv at snf.stanford.edu Mon Aug 13 18:27:26 2007 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Mon, 13 Aug 2007 18:27:26 -0700 Subject: Problem karlsuss SNF 2007-08-13 18:27:24: Wafer loading tray not locking into place Message-ID: It keeps sliding out and doesn't lock into place. From gsosa at snf.stanford.edu Tue Aug 14 08:27:43 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Aug 2007 08:27:43 -0700 Subject: Problem karlsuss SNF 2007-08-13 18:27:24: Wafer loading tray not locking into place Message-ID: Repositioned the interface cable to the wafer stage. GS From tdo at snf.stanford.edu Tue Aug 14 12:28:59 2007 From: tdo at snf.stanford.edu (tdo at snf.stanford.edu) Date: Tue, 14 Aug 2007 12:28:59 -0700 Subject: Problem karlsuss SNF 2007-08-14 12:28:59: lamp intensity low Message-ID: lamp intensity showing 13.5mW From gsosa at snf.stanford.edu Tue Aug 14 17:20:34 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 14 Aug 2007 17:20:34 -0700 Subject: Problem karlsuss SNF 2007-08-14 12:28:59: lamp intensity low Message-ID: Checked and calibrated lamp intensity . From sergei at snf.stanford.edu Thu Aug 23 07:37:24 2007 From: sergei at snf.stanford.edu (sergei at snf.stanford.edu) Date: Thu, 23 Aug 2007 07:37:24 -0700 Subject: Problem karlsuss SNF 2007-08-23 07:37:23: karlsuss mask vacuum Message-ID: Something wrong with vacuum, karlsuss kept droping my mask down to the wafer. From vilanova at snf.stanford.edu Thu Aug 23 09:08:30 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 23 Aug 2007 09:08:30 -0700 Subject: Problem karlsuss SNF 2007-08-23 07:37:23: karlsuss mask vacuum Message-ID: SOmeone removed the Chuck while the vacuum was on, I Initialized it , system back to normal. From vilanova at snf.stanford.edu Mon Aug 27 14:06:31 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Aug 2007 14:06:31 -0700 Subject: Shutdown karlsuss SNF 2007-08-27 14:06:31: monthly lamp change in progress.... Message-ID: From vilanova at snf.stanford.edu Mon Aug 27 15:03:21 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 27 Aug 2007 15:03:21 -0700 Subject: Shutdown karlsuss SNF 2007-08-27 14:06:31: monthly lamp change in progress.... Message-ID: Monthly lamp change completed lamp calibrated Intensity = 15mw/cm2 Uniformity 2.9%