Problem karlsuss SNF 2007-08-07 18:57:44: Uneven exposure on vac

beinn at snf.stanford.edu beinn at snf.stanford.edu
Tue Aug 7 18:57:44 PDT 2007


Ran two wafers with 1um 3612 on vac. Got very poor uniformity esp at the edges. Could not really resolve the 1.5um lines and 2um squares.




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