Problem karlsuss SNF 2007-08-07 18:57:44: Uneven exposure on vac

beinn at snf.stanford.edu beinn at snf.stanford.edu
Tue Aug 7 18:57:44 PDT 2007

Previous message: Problem karlsuss SNF 2007-07-28 11:48:42: system frozen
Next message: Problem karlsuss SNF 2007-08-07 18:57:44: Uneven exposure on vac
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Ran two wafers with 1um 3612 on vac. Got very poor uniformity esp at the edges. Could not really resolve the 1.5um lines and 2um squares.

Previous message: Problem karlsuss SNF 2007-07-28 11:48:42: system frozen
Next message: Problem karlsuss SNF 2007-08-07 18:57:44: Uneven exposure on vac
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the karlsuss-pcs mailing list