Problem karlsuss SNF 2007-08-08 09:57:08: Low exposure confirmed

jparker at snf.stanford.edu jparker at snf.stanford.edu
Wed Aug 8 09:57:09 PDT 2007


3612, 1 um resist---vac. 1 sec leaves visible underexposure 1" around edge.
3612, 1.6 um resist---vac. 1.4 sec. leaves underexposure 1" around edge.
220-7, 7um resist---vac 3.0x2 sec. leaves underexposure 1" arournd edge.




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