From dgunning at snf.stanford.edu Tue Feb 20 22:41:53 2007 From: dgunning at snf.stanford.edu (dgunning at snf.stanford.edu) Date: Tue, 20 Feb 2007 22:41:53 -0800 Subject: Problem karlsuss SNF 2007-02-20 22:41:53: wafer table and beeping Message-ID: very difficult to get wafer table to push all the way in to do alignment. Seems the vacuum cable is in wrong place and is stopping it (???) Also during exposure, the machine beeps (was doing 2 * 8.5s and it beeped 3 times during each 8.5s exp.) From vilanova at snf.stanford.edu Wed Feb 21 08:29:27 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 21 Feb 2007 08:29:27 -0800 Subject: Problem karlsuss SNF 2007-02-20 22:41:53: wafer table and beeping Message-ID: there was a cable stuck between the bottom microscopes I guess the tie that it was holding it in place came off, I replaced it with a new one, now cable is not obstructing the chuck inserter , ALso this morning I notice that the lamp wattage and intensity were very high , it seems to me that someone was moving the X Y Z buttons , PLEASE DO NOT DO THAT! , I calibrated the lamp again and tested ok, ready to use. From uyoon at snf.stanford.edu Mon Feb 26 17:08:54 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Mon, 26 Feb 2007 17:08:54 -0800 Subject: Problem karlsuss SNF 2007-02-26 17:08:53: Message-ID: around edges didn't get developed off with standard 1sec exposure with 1um resist on KS1 Mario please check lamp intensity . KS2 looks beautiful with the same condition. From vilanova at snf.stanford.edu Tue Feb 27 09:13:10 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 27 Feb 2007 09:13:10 -0800 Subject: Problem karlsuss SNF 2007-02-26 17:08:53: Message-ID: