Problem karlsuss SNF 2007-02-20 22:41:53: wafer table and beeping

dgunning at dgunning at
Tue Feb 20 22:41:53 PST 2007

very difficult to get wafer table to push all the way in to do alignment.  Seems the vacuum cable is in wrong place and is stopping it (???)  Also during exposure, the machine beeps (was doing 2 * 8.5s and it beeped 3 times during each 8.5s exp.)

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