From uyoon at snf.stanford.edu Tue Jan 2 15:56:02 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Tue, 2 Jan 2007 15:56:02 -0800 Subject: Comment karlsuss SNF 2007-01-02 15:56:02: Message-ID: Exposure test done with 1um 3612 resist. 1.1 sec on both KS1 and KS2 looked very good. 1.5 um L/S on Vertical and 1.0 um L/S on horizontal are good. A little over exposed, but resist was 2 weeks old.(couldn't use new resist due do a SVG coater problem) From mahnaz at snf.stanford.edu Mon Jan 15 14:16:59 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 15 Jan 2007 14:16:59 -0800 Subject: Shutdown karlsuss SNF 2007-01-15 14:16:59: I released susi's mask Message-ID: I am not able to restart the system. After resetting the system sits there not able to lift the objectiveseither. From vilanova at snf.stanford.edu Wed Jan 17 08:13:43 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 17 Jan 2007 08:13:43 -0800 Subject: Shutdown karlsuss SNF 2007-01-15 14:16:59: I released susi's mask Message-ID: Centered X and Y micrometer and theta , Installed Mask HOusing Panel, MOved microscope Out of parking position, tested , Good to use. From vilanova at snf.stanford.edu Tue Jan 30 13:08:50 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 Jan 2007 13:08:50 -0800 Subject: Shutdown karlsuss SNF 2007-01-30 13:08:49: MOnthly Lamp change in progress..... Message-ID: From vilanova at snf.stanford.edu Tue Jan 30 13:58:38 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 30 Jan 2007 13:58:38 -0800 Subject: Shutdown karlsuss SNF 2007-01-30 13:08:49: MOnthly Lamp change in progress..... Message-ID: Monthly Pm Completed , lamp calibrated Intensity 15Mw/Cm2 Uniformity = 1.6% ready to use.