Comment karlsuss SNF 2007-01-02 15:56:02:

[uyoon at snf.stanford.edu]

Exposure test done with 1um 3612 resist.
1.1 sec on both KS1 and KS2 looked very good.
1.5 um L/S on Vertical and 1.0 um L/S on horizontal  are good.
A little over exposed, but resist was 2 weeks old.(couldn't  use new resist due do a SVG coater problem)