From jprovine at snf.stanford.edu Sun Jun 3 15:05:35 2007 From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu) Date: Sun, 3 Jun 2007 15:05:35 -0700 Subject: Problem karlsuss SNF 2007-06-03 15:05:35: substrate chuck will not load Message-ID: the substrate/wafer chuck will not slide easily into the load position and will not stay there if placed by mild force in that position (springs back out). it would found in correct position, so i don't know what i could have done to it in loading my first wafer. problem is independent of chuck used. no visible obstruction to the guide arms or slider. From gsosa at snf.stanford.edu Mon Jun 4 09:11:37 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 4 Jun 2007 09:11:37 -0700 Subject: Problem karlsuss SNF 2007-06-03 15:05:35: substrate chuck will not load Message-ID: Repositioned the umbilical harness to the wafer plate. Chuckplate moves in and out smoothly now. From kgleason at snf.stanford.edu Sun Jun 10 16:32:35 2007 From: kgleason at snf.stanford.edu (kgleason at snf.stanford.edu) Date: Sun, 10 Jun 2007 16:32:35 -0700 Subject: Problem karlsuss SNF 2007-06-10 16:32:34: keypad not responding Message-ID: While using karlsuss, the keypad stopped responding to input. In an attempt to resolve the problem, we powered karlsuss off then on, but the system has not booted up successfully (stuck at "please wait..."). From vilanova at snf.stanford.edu Mon Jun 11 06:59:04 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 11 Jun 2007 06:59:04 -0700 Subject: Problem karlsuss SNF 2007-06-10 16:32:34: keypad not responding Message-ID: Initialized system parameters , tested ok, ready to use. From vilanova at snf.stanford.edu Wed Jun 13 07:37:20 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jun 2007 07:37:20 -0700 Subject: Shutdown karlsuss SNF 2007-06-13 07:37:19: monthly lamp change in progress.... Message-ID: From vilanova at snf.stanford.edu Wed Jun 13 09:22:11 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 13 Jun 2007 09:22:11 -0700 Subject: Shutdown karlsuss SNF 2007-06-13 07:37:19: monthly lamp change in progress.... Message-ID: MOnthly Lamp change completed, lamp calibrated Intensity = 15Mw/Cm2 Uniformity = 3. % Ready to use . From dejia at snf.stanford.edu Wed Jun 13 22:43:25 2007 From: dejia at snf.stanford.edu (dejia at snf.stanford.edu) Date: Wed, 13 Jun 2007 22:43:25 -0700 Subject: Problem karlsuss SNF 2007-06-13 22:43:25: right field microscope Message-ID: Right field microscope is not moving itz full range. left field microscope is fine From vilanova at snf.stanford.edu Thu Jun 14 08:27:03 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jun 2007 08:27:03 -0700 Subject: Problem karlsuss SNF 2007-06-13 22:43:25: right field microscope Message-ID: Could not duplicate the problem, I checked and compared both Sus 1 and 2 and they are at the similar range. Ready to use. From haniff at snf.stanford.edu Thu Jun 14 09:48:01 2007 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Thu, 14 Jun 2007 09:48:01 -0700 Subject: Problem karlsuss SNF 2007-06-14 09:48:00: lamp hopuse will not come out Message-ID: Machine gets locked up if "expose" is pushed From vilanova at snf.stanford.edu Thu Jun 14 11:03:45 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 14 Jun 2007 11:03:45 -0700 Subject: Problem karlsuss SNF 2007-06-14 09:48:00: lamp hopuse will not come out Message-ID: Lamphouse working fine now, maybe the software had a glitch , system ok now. From tkodama at snf.stanford.edu Fri Jun 15 19:38:39 2007 From: tkodama at snf.stanford.edu (tkodama at snf.stanford.edu) Date: Fri, 15 Jun 2007 19:38:39 -0700 Subject: Problem karlsuss SNF 2007-06-15 19:38:39: Error Message-ID: Karlsuss show an error. From huangzb at snf.stanford.edu Sun Jun 17 23:51:14 2007 From: huangzb at snf.stanford.edu (huangzb at snf.stanford.edu) Date: Sun, 17 Jun 2007 23:51:14 -0700 Subject: Problem karlsuss SNF 2007-06-17 23:51:13: chuck did not stay in position Message-ID: keeps poping out. Seems like some locking mechanism to keep the chuck in position is broken. From vilanova at snf.stanford.edu Mon Jun 18 07:44:18 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Jun 2007 07:44:18 -0700 Subject: Problem karlsuss SNF 2007-06-15 19:38:39: Error Message-ID: the chuck inserter cable was in the way, adjusted cable, tested Good , ok to use. From vilanova at snf.stanford.edu Mon Jun 18 07:44:37 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 18 Jun 2007 07:44:37 -0700 Subject: Problem karlsuss SNF 2007-06-17 23:51:13: chuck did not stay in position Message-ID: adjusted chuck cable position, ok to use. From vilanova at snf.stanford.edu Wed Jun 20 09:00:39 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 Jun 2007 09:00:39 -0700 Subject: Shutdown karlsuss SNF 2007-06-20 09:00:38: Maintenance in progress..... Message-ID: checking system per User request ( no mask vacuum) From vilanova at snf.stanford.edu Wed Jun 20 10:53:30 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 20 Jun 2007 10:53:30 -0700 Subject: Shutdown karlsuss SNF 2007-06-20 09:00:38: Maintenance in progress..... Message-ID: this morning when a user came in he noticed that someone left the 3 Inch mask holder in placed , after that he tried to use the system and system was not holding vacuum, I checked everything and I found the mask holder disconected from the inside " seems like someone was trying to disconect the 3Inch mask and since they couldnt they force it out and they disconected the hose from the mask holder screw.