Problem karlsuss SNF 2007-06-03 15:05:35: substrate chuck will not load

jprovine at snf.stanford.edu jprovine at snf.stanford.edu
Sun Jun 3 15:05:35 PDT 2007


the substrate/wafer chuck will not slide easily into the load position and will not stay there if placed by mild force in that position (springs back out).  it would found in correct position, so i don't know what i could have done to it in loading my first wafer.  problem is independent of chuck used.  no visible obstruction to the guide arms or slider.




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