From uyoon at snf.stanford.edu Thu Mar 1 13:26:36 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 1 Mar 2007 13:26:36 -0800 Subject: Problem karlsuss SNF 2007-03-01 13:26:35: Message-ID: There is still a issues with lamp. 1um resist with 1 sec is under exposed. From vilanova at snf.stanford.edu Thu Mar 1 14:19:45 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 1 Mar 2007 14:19:45 -0800 Subject: Problem karlsuss SNF 2007-03-01 13:26:35: Message-ID: Lamp re-Calibration Completed, Intensity was Off 4 POints ( set point 15.0 )Tested, Ready to use. From uyoon at snf.stanford.edu Thu Mar 1 16:08:17 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 1 Mar 2007 16:08:17 -0800 Subject: Problem karlsuss SNF 2007-03-01 16:08:17: Message-ID: loooks much better, but still there is under exposed area around edges this is 1sec exposure with 1um resist. From vilanova at snf.stanford.edu Fri Mar 2 07:19:09 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Mar 2007 07:19:09 -0800 Subject: Shutdown karlsuss SNF 2007-03-02 07:19:09: Monthly Lamp change in progress..... Message-ID: MLP in progress.... From vilanova at snf.stanford.edu Fri Mar 2 08:10:42 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Mar 2007 08:10:42 -0800 Subject: Problem karlsuss SNF 2007-03-01 16:08:17: Message-ID: Monthly lamp change completed Intensity 15Mw/cm2 Uniformity = 2.70% From vilanova at snf.stanford.edu Fri Mar 2 08:11:00 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 2 Mar 2007 08:11:00 -0800 Subject: Shutdown karlsuss SNF 2007-03-02 07:19:09: Monthly Lamp change in progress..... Message-ID: Monthly Lamp change completed. From mahnaz at snf.stanford.edu Fri Mar 2 11:52:38 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 2 Mar 2007 11:52:38 -0800 Subject: Comment karlsuss SNF 2007-03-02 11:52:38: I ran a test Message-ID: 1 um resist and exposed it 1 second . top, left, right and flat 1.5um resolved. The center 2.5 um was resolved. I think is more the WEC than anything else. From xzhuan1 at snf.stanford.edu Sun Mar 4 16:53:02 2007 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Sun, 4 Mar 2007 16:53:02 -0800 Subject: Problem karlsuss SNF 2007-03-04 16:53:02: wafer chuck doesn't sit in properly Message-ID: From vilanova at snf.stanford.edu Mon Mar 5 07:10:32 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 5 Mar 2007 07:10:32 -0800 Subject: Problem karlsuss SNF 2007-03-04 16:53:02: wafer chuck doesn't sit in properly Message-ID: the mask holder vacuum hose was obstructing the chuck to go all the way in , Adjusted Hose position , ok to use. From mislam at snf.stanford.edu Wed Mar 21 14:19:04 2007 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 21 Mar 2007 14:19:04 -0700 Subject: Problem karlsuss SNF 2007-03-21 14:19:04: Mask vacuum loss with vac contact exposure Message-ID: While trying to expose with vac. contact everytime I do a alignment check and expose wafer mask vacuum is lost and mask eventually drops with the wafer. This is happening since last week. It was fine before that. From mahnaz at snf.stanford.edu Wed Mar 21 16:52:23 2007 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 21 Mar 2007 16:52:23 -0700 Subject: Problem karlsuss SNF 2007-03-21 14:19:04: Mask vacuum loss with vac contact exposure Message-ID: Garry could not clear this so I am doing it for him. He cleaned the mask holder and tested the system with mask only. we need to duplicate what Mohammed was observing till then if you notice any issues please note it in the system. From uyoon at snf.stanford.edu Thu Mar 22 09:52:28 2007 From: uyoon at snf.stanford.edu (uyoon at snf.stanford.edu) Date: Thu, 22 Mar 2007 09:52:28 -0700 Subject: Problem karlsuss SNF 2007-03-22 09:52:27: Message-ID: There is a problem with mask vacuum. With Vac contact, sometimes mask unloads with wafer especially with thick resist.. From vilanova at snf.stanford.edu Mon Mar 26 07:05:17 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 26 Mar 2007 07:05:17 -0700 Subject: Problem karlsuss SNF 2007-03-22 09:52:27: Message-ID: I've Adjusted vacuum pressure I checked and tested the system , looks Good now, ok to use. From hongxu at snf.stanford.edu Thu Mar 29 15:35:41 2007 From: hongxu at snf.stanford.edu (hongxu at snf.stanford.edu) Date: Thu, 29 Mar 2007 15:35:41 -0700 Subject: Comment karlsuss SNF 2007-03-29 15:35:41: Suss#1 Message-ID: Lost mask vac after exposure