Comment karlsuss SNF 2007-03-02 11:52:38: I ran a test

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Mar 2 11:52:38 PST 2007


1 um resist and exposed it 1 second . top, left, right and flat 1.5um  resolved. The center 2.5 um was resolved. I think is more the WEC than anything else.




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