Problem karlsuss SNF 2007-03-04 16:53:02: wafer chuck doesn't sit in properly

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Mon Mar 5 07:10:32 PST 2007


the mask holder vacuum hose was obstructing the chuck to 
go all the way in , Adjusted Hose position , ok to use. 




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