Problem karlsuss SNF 2007-03-04 16:53:02: wafer chuck doesn't sit in properly
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Mon Mar 5 07:10:32 PST 2007
the mask holder vacuum hose was obstructing the chuck to
go all the way in , Adjusted Hose position , ok to use.
More information about the karlsuss-pcs
mailing list