Problem karlsuss SNF 2007-03-21 14:19:04: Mask vacuum loss with vac contact exposure

mislam at snf.stanford.edu mislam at snf.stanford.edu
Wed Mar 21 14:19:04 PDT 2007


While trying to expose with vac. contact everytime I do
a alignment check and expose wafer mask vacuum is lost
and mask eventually drops with the wafer. This is happening
since last week. It was fine before that.




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