Problem karlsuss SNF 2007-03-22 09:52:27:

uyoon at snf.stanford.edu uyoon at snf.stanford.edu
Thu Mar 22 09:52:28 PDT 2007

Previous message: Problem karlsuss SNF 2007-03-21 14:19:04: Mask vacuum loss with vac contact exposure
Next message: Problem karlsuss SNF 2007-03-22 09:52:27:
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

There is a problem with mask vacuum.
With Vac contact, sometimes mask unloads with wafer 
especially with thick resist..

Previous message: Problem karlsuss SNF 2007-03-21 14:19:04: Mask vacuum loss with vac contact exposure
Next message: Problem karlsuss SNF 2007-03-22 09:52:27:
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the karlsuss-pcs mailing list