Problem karlsuss SNF 2007-11-28 17:16:22: micrometer limits

tdo at snf.stanford.edu tdo at snf.stanford.edu
Wed Nov 28 17:16:23 PST 2007


Can only move x and y stage micrometers +/- 3mm before machine alarms, when I used to be able to go much further.  Is there someway to change this range?  I use pieces and need to be able to shift the piece between different sections of the mask.  




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