From razevedo at snf.stanford.edu Wed Oct 3 16:40:15 2007 From: razevedo at snf.stanford.edu (razevedo at snf.stanford.edu) Date: Wed, 3 Oct 2007 16:40:15 -0700 Subject: Problem karlsuss SNF 2007-10-03 16:40:14: wafer stage issue Message-ID: During my session, started becoming difficult to push in the wafer stage during loading. I could not find anything binding, but stage wants to pop back out when pushed in. From rostam at snf.stanford.edu Wed Oct 3 17:40:55 2007 From: rostam at snf.stanford.edu (rostam at snf.stanford.edu) Date: Wed, 3 Oct 2007 17:40:55 -0700 Subject: Problem karlsuss SNF 2007-10-03 17:40:51: wafer carrier comes out by itself Message-ID: From vilanova at snf.stanford.edu Thu Oct 4 07:55:56 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Oct 2007 07:55:56 -0700 Subject: Problem karlsuss SNF 2007-10-03 16:40:14: wafer stage issue Message-ID: carrier cable was in the way, that's why the chuck stage wasnt moving in properly, I moved the cable away , now the chuck stage moves freely. From vilanova at snf.stanford.edu Thu Oct 4 07:56:07 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Oct 2007 07:56:07 -0700 Subject: Problem karlsuss SNF 2007-10-03 17:40:51: wafer carrier comes out by itself Message-ID: carrier cable was in the way, that's why the chuck stage wasnt moving in properly, I moved the cable away , now the chuck stage moves freely. From bilee at snf.stanford.edu Mon Oct 8 23:58:05 2007 From: bilee at snf.stanford.edu (bilee at snf.stanford.edu) Date: Mon, 8 Oct 2007 23:58:05 -0700 Subject: Problem karlsuss SNF 2007-10-08 23:58:05: Stopped at "Ready for Load" Message-ID: When I came to the tool, it was showing "Ready for Load" and did not work with any button. From vilanova at snf.stanford.edu Tue Oct 9 07:30:38 2007 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 9 Oct 2007 07:30:38 -0700 Subject: Problem karlsuss SNF 2007-10-08 23:58:05: Stopped at "Ready for Load" Message-ID: Initialized System, tested, ok to use. From gsosa at snf.stanford.edu Tue Oct 30 07:32:35 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 30 Oct 2007 07:32:35 -0700 Subject: Shutdown karlsuss SNF 2007-10-30 07:32:34: Scheduled lamp change Message-ID: Replacing the UV lamp From gsosa at snf.stanford.edu Tue Oct 30 08:40:00 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 30 Oct 2007 08:40:00 -0700 Subject: Shutdown karlsuss SNF 2007-10-30 07:32:34: Scheduled lamp change Message-ID: Replaced and set up UV lamp. Intensity set to 15.0 Mw/cms.