Problem karlsuss SNF 2007-10-03 16:40:14: wafer stage issue

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Oct 4 07:55:56 PDT 2007


carrier cable was in the way, that's why the chuck stage 
wasnt moving in properly, I moved the cable away , now the
chuck stage moves freely. 




More information about the karlsuss-pcs mailing list