Problem karlsuss SNF 2007-10-03 17:40:51: wafer carrier comes out by itself
vilanova at snf.stanford.edu
vilanova at snf.stanford.edu
Thu Oct 4 07:56:07 PDT 2007
carrier cable was in the way, that's why the chuck stage
wasnt moving in properly, I moved the cable away , now the
chuck stage moves freely.
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