Problem karlsuss SNF 2007-10-03 17:40:51: wafer carrier comes out by itself

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Oct 4 07:56:07 PDT 2007


carrier cable was in the way, that's why the chuck stage 
wasnt moving in properly, I moved the cable away , now the
chuck stage moves freely. 




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