From vilanova at snf.stanford.edu Thu Apr 10 07:41:02 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Apr 2008 07:41:02 -0700 Subject: Shutdown karlsuss SNF 2008-04-10 07:41:01: MOnthly lamp change .................. Message-ID: From vilanova at snf.stanford.edu Thu Apr 10 08:28:34 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 10 Apr 2008 08:28:34 -0700 Subject: Shutdown karlsuss SNF 2008-04-10 07:41:01: MOnthly lamp change .................. Message-ID: Monthly Lamp Completed Intensity = 15Mw/Cm2 Uniformity = 1% From mahnaz at snf.stanford.edu Fri Apr 11 15:24:18 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 11 Apr 2008 15:24:18 -0700 Subject: Comment karlsuss SNF 2008-04-11 15:24:16: up date Message-ID: The lamp has been changed and I ran a 1 um 3612 at 1.1 second of exposure, 1 um line and space was resolved across the wafer. Looked beautiful. From mrlin at snf.stanford.edu Mon Apr 21 13:34:08 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Mon, 21 Apr 2008 13:34:08 -0700 Subject: Comment karlsuss SNF 2008-04-21 13:34:08: KS1 Quals, Week of 4/13 Message-ID: 1um 3612: reolved 1um 1.6um 3612: resolved 1.5um, and some 1um 7um SPR-220-7: resolved 2.5um From mrlin at snf.stanford.edu Mon Apr 21 13:35:32 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Mon, 21 Apr 2008 13:35:32 -0700 Subject: Problem karlsuss SNF 2008-04-21 13:35:24: stage center Message-ID: stage center is at odd values of x,y and rotation is a bit off, even though the rotation aligner says it's aligned From vilanova at snf.stanford.edu Tue Apr 22 07:26:46 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 22 Apr 2008 07:26:46 -0700 Subject: Problem karlsuss SNF 2008-04-21 13:35:24: stage center Message-ID: Removed the X micrometer and re-installed the ball bearing tip. Re-installed and checked X travel- All OK. Checked and cleaned critical surfaces and reset system. Tested with dummy wafers- all OK. From mrlin at snf.stanford.edu Fri Apr 25 16:31:59 2008 From: mrlin at snf.stanford.edu (mrlin at snf.stanford.edu) Date: Fri, 25 Apr 2008 16:31:59 -0700 Subject: Comment karlsuss SNF 2008-04-25 16:31:59: KS1 Litho Quals, Week of 4/20 Message-ID: 1um 3612 1.0s: 1um resolved 1.6um 3612 1.6s: at best 1um resolved 7um SPR-220-7 3.0sx2: at best 2um resolved