Comment karlsuss SNF 2008-04-11 15:24:16: up date

mahnaz at snf.stanford.edu mahnaz at snf.stanford.edu
Fri Apr 11 15:24:18 PDT 2008


The lamp has been changed and I  ran a 1 um 3612  at 1.1 second of exposure,  1 um line and space was resolved across the wafer. Looked beautiful.




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