Problem karlsuss SNF 2008-04-21 13:35:24: stage center

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Tue Apr 22 07:26:46 PDT 2008


Removed the X micrometer and re-installed the ball bearing tip. Re-installed and checked X travel- All OK. Checked and cleaned critical surfaces and reset system. Tested with dummy wafers- all OK.  




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