From gsosa at snf.stanford.edu Wed Dec 3 08:51:19 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 3 Dec 2008 08:51:19 -0800 Subject: Comment karlsuss SNF 2008-12-03 08:51:18: Lamp Replaced 12/3 Message-ID: Checked lamp intensity. Could not calibrate to 15 Mw/cm2 without going into alarm. Replaced and set up new UV lamp. calibrated to 15 Mw/cm2. Uniformity is 2.3 % From xzhuan1 at snf.stanford.edu Thu Dec 4 09:14:49 2008 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 4 Dec 2008 09:14:49 -0800 Subject: Problem karlsuss SNF 2008-12-04 09:14:48: alignment difficulty Message-ID: two problems: 1. in tsa, the light intensity for the microscopes are very different on the two sides. 2. right side microscope doesn't focus well From vilanova at snf.stanford.edu Thu Dec 4 09:40:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Dec 2008 09:40:29 -0800 Subject: Problem karlsuss SNF 2008-12-04 09:14:48: alignment difficulty Message-ID: 1) I showed the User where the ilumination pegs are to increase or decrease the MIcroscopes Lights. 2) the focus On the right Side could be due to his wafer, but I will put in our mask and wafers to double check. 3) the Suss Engineer Will be here to perform an Annual PM to both Systems. From jwpchen at snf.stanford.edu Sun Dec 7 03:11:35 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Sun, 7 Dec 2008 03:11:35 -0800 Subject: Problem karlsuss SNF 2008-12-07 03:11:35: lamp life Message-ID: lamp life/power light blinky From vilanova at snf.stanford.edu Mon Dec 8 08:24:28 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 8 Dec 2008 08:24:28 -0800 Subject: Problem karlsuss SNF 2008-12-07 03:11:35: lamp life Message-ID: recalibrated lamp, Intensity = 15.1 uniformity = 2% NO more lamp life blinkng signal. ok to use. From gsosa at snf.stanford.edu Thu Dec 11 08:44:27 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Dec 2008 08:44:27 -0800 Subject: Shutdown karlsuss SNF 2008-12-11 08:44:27: Checking lamp intensity Message-ID: Checking lamp intensity and cleaning the reflector From gsosa at snf.stanford.edu Thu Dec 11 10:32:46 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 11 Dec 2008 10:32:46 -0800 Subject: Shutdown karlsuss SNF 2008-12-11 08:44:27: Checking lamp intensity Message-ID: Cleaned the reflector. Re-started the lamp. Calibrated lamp intensity to 15.0 mw/cm2. Uniformity:1.9% From rcordova at snf.stanford.edu Fri Dec 12 14:35:51 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Fri, 12 Dec 2008 14:35:51 -0800 Subject: Problem karlsuss SNF 2008-12-12 14:35:45: Lamp is alarming.. Message-ID: Mario to the rescue! Mario is checking Calibration on the tool. RC From vilanova at snf.stanford.edu Fri Dec 12 14:48:24 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 12 Dec 2008 14:48:24 -0800 Subject: Problem karlsuss SNF 2008-12-12 14:35:45: Lamp is alarming.. Message-ID: recalibrated lamp and tested, ok to use. From jwpchen at snf.stanford.edu Tue Dec 16 06:23:35 2008 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 16 Dec 2008 06:23:35 -0800 Subject: Problem karlsuss SNF 2008-12-16 06:23:34: chuck x-offset vs micrometer Message-ID: with x micrometer at x > 6mm, beep error 'chuck out of range', cannot center to the usual x = 10mm From vilanova at snf.stanford.edu Tue Dec 16 11:11:42 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Dec 2008 11:11:42 -0800 Subject: Problem karlsuss SNF 2008-12-16 06:23:34: chuck x-offset vs micrometer Message-ID: the micrometer spacer was missing from the wec end, I found it right next to the right bottom microscope and reinstalled, tested, ok to use.