From mgobet at snf.stanford.edu Tue Feb 5 12:00:38 2008 From: mgobet at snf.stanford.edu (mgobet at snf.stanford.edu) Date: Tue, 5 Feb 2008 12:00:38 -0800 Subject: Problem karlsuss SNF 2008-02-05 12:00:38: Resolution problems Message-ID: Hello, The litho I did this morning were unsuccessfull. I have small features (3-8 um) and they did not appear. I noticed a message from Mary a while ago regarding similar problems. When is the tool supposed to be repaired? What should I do in the meantime? From mahnaz at snf.stanford.edu Tue Feb 5 13:11:59 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 5 Feb 2008 13:11:59 -0800 Subject: Problem karlsuss SNF 2008-02-05 12:00:38: Resolution problems Message-ID: I think something went wrong. I have talked to Mathilde and it might be the chemical. From ski4ever at snf.stanford.edu Tue Feb 5 20:06:28 2008 From: ski4ever at snf.stanford.edu (ski4ever at snf.stanford.edu) Date: Tue, 5 Feb 2008 20:06:28 -0800 Subject: Comment karlsuss SNF 2008-02-05 20:06:27: split field focus Message-ID: had difficulty on 10x lens to get both right and left to focus at the same time, were very near the opposite limits of the fine focus in order for both to be reasonably seen, and there is a large centering offset when switching between 10x and 5x lens on left field From closega at snf.stanford.edu Wed Feb 6 01:00:50 2008 From: closega at snf.stanford.edu (closega at snf.stanford.edu) Date: Wed, 6 Feb 2008 01:00:50 -0800 Subject: Problem karlsuss SNF 2008-02-06 01:00:47: Computer stuck Message-ID: From vilanova at snf.stanford.edu Wed Feb 6 07:27:12 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Feb 2008 07:27:12 -0800 Subject: Problem karlsuss SNF 2008-02-06 01:00:47: Computer stuck Message-ID: Initialized system, computer seems ok now, sometimes computer get stuck when ( by mistake) the user press 2 buttons at the same time ( i,m not saying this was the case but sometimes that happens) . From vilanova at snf.stanford.edu Wed Feb 6 07:31:31 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 6 Feb 2008 07:31:31 -0800 Subject: Comment karlsuss SNF 2008-02-05 20:06:27: split field focus Message-ID: To focus you have to use the focus knob on top of the Objectives, the knobs on the panel are just for smooth focus, if you still have problems with focus, please ask Mahanz, Mario , Gary we'll be happy to help you . From vilanova at snf.stanford.edu Thu Feb 7 07:40:04 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Feb 2008 07:40:04 -0800 Subject: Shutdown karlsuss SNF 2008-02-07 07:40:04: Monthly lamp change in progress.... Message-ID: From vilanova at snf.stanford.edu Thu Feb 7 08:13:28 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Feb 2008 08:13:28 -0800 Subject: Shutdown karlsuss SNF 2008-02-07 07:40:04: Monthly lamp change in progress.... Message-ID: Monthly Lamp change completed. Intensity 15Mw/Cm2 Uniformity = 2% From vilanova at snf.stanford.edu Thu Feb 7 08:14:42 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Feb 2008 08:14:42 -0800 Subject: Problem karlsuss SNF 2008-01-15 01:06:22: grab image function Message-ID: I've checked grab Image, I used Mahanz Resolution mask, I could not repeat the Oscillation problem reported a few days ago , Grab Image seems to be Fine, Ok to use. From vilanova at snf.stanford.edu Thu Feb 7 08:17:34 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 7 Feb 2008 08:17:34 -0800 Subject: Problem karlsuss SNF 2008-01-22 17:09:01: Wafer vacuum loss error Message-ID: I checked and run a few dummy wafers , I didnt get any wafer loss error, Sometimes this happens when the chuck is dirty or someone put tape over it, so it would be good to clean the chuck ( wipes and Isopropyl) to make sure you dont get particles or vacuum sensor errors. From mkerby at snf.stanford.edu Tue Feb 12 15:54:40 2008 From: mkerby at snf.stanford.edu (mkerby at snf.stanford.edu) Date: Tue, 12 Feb 2008 15:54:40 -0800 Subject: Comment karlsuss SNF 2008-02-12 15:54:40: works great Message-ID: Ran 1.6um 3612 on amorphous silicon over glass. 1.5s exposure. From vilanova at snf.stanford.edu Fri Feb 15 08:17:11 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 15 Feb 2008 08:17:11 -0800 Subject: Comment karlsuss SNF 2008-02-15 08:17:10: Bottom MIcroscope LEFT BULB DEAD Message-ID: A user was having problems with backside light, I noticed that the left microscope bulb was bad , I replaced it User is happy. From shwong at snf.stanford.edu Wed Feb 20 19:02:58 2008 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Wed, 20 Feb 2008 19:02:58 -0800 Subject: Problem karlsuss SNF 2008-02-20 19:02:58: dropped my mask for some reason Message-ID: hi, turned the vacuum on; my mask was dropped for some reason. reloaded it and then it was fine. Not sure what the problem was. From vilanova at snf.stanford.edu Thu Feb 21 07:55:11 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 21 Feb 2008 07:55:11 -0800 Subject: Problem karlsuss SNF 2008-02-20 19:02:58: dropped my mask for some reason Message-ID: checked mask vacuum, tested system a few times, system vacuum normal, ok to use. From fungus at snf.stanford.edu Mon Feb 25 16:25:51 2008 From: fungus at snf.stanford.edu (fungus at snf.stanford.edu) Date: Mon, 25 Feb 2008 16:25:51 -0800 Subject: Problem karlsuss SNF 2008-02-25 16:25:41: substrate y axis not moving Message-ID: the y-axis for alignment does not appear to be adjustable. From dejia at snf.stanford.edu Mon Feb 25 22:00:01 2008 From: dejia at snf.stanford.edu (dejia at snf.stanford.edu) Date: Mon, 25 Feb 2008 22:00:01 -0800 Subject: Shutdown karlsuss SNF 2008-02-25 22:00:00: running noisy motor Message-ID: From gsosa at snf.stanford.edu Tue Feb 26 14:42:22 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 26 Feb 2008 14:42:22 -0800 Subject: Problem karlsuss SNF 2008-02-25 16:25:41: substrate y axis not moving Message-ID: checked X,Y and theta substrate travel. All looks good. From gsosa at snf.stanford.edu Tue Feb 26 14:46:04 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 26 Feb 2008 14:46:04 -0800 Subject: Shutdown karlsuss SNF 2008-02-25 22:00:00: running noisy motor Message-ID: The fine focus motors on the top microscope are pulsing. Working with Karl Suss tech support to resolve problem. The problem is intermittant and has dis-appeared for now. Will relay gathered info to tech support. tested top microscope focussing and X,Y and Theta movement. All OK. From mahnaz at snf.stanford.edu Fri Feb 29 14:20:38 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 29 Feb 2008 14:20:38 -0800 Subject: Shutdown karlsuss SNF 2008-02-29 14:20:38: system is lucked up Message-ID: Gary is busy, will look in to it. From gsosa at snf.stanford.edu Fri Feb 29 14:56:04 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 29 Feb 2008 14:56:04 -0800 Subject: Shutdown karlsuss SNF 2008-02-29 14:20:38: system is lucked up Message-ID: The system is locked up. had to cycle power to reset. Also checked and calibrated lamp power supply. From mahnaz at snf.stanford.edu Fri Feb 29 16:37:31 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Fri, 29 Feb 2008 16:37:31 -0800 Subject: Shutdown karlsuss SNF 2008-02-29 16:37:31: stuck Message-ID: system keeps giving X and Y error. The microscope would not go up when it should. Gary tried to initialize and would not even listen. Need to call Karlsuss, will do it on Monday.