Problem karlsuss SNF 2008-02-05 12:00:38: Resolution problems

mgobet at snf.stanford.edu mgobet at snf.stanford.edu
Tue Feb 5 12:00:38 PST 2008


Hello, 
The litho I did this morning were unsuccessfull. I have small features (3-8 um) and they did not appear. I noticed a message from Mary a while ago regarding similar problems. When is the tool supposed to be repaired? What should I do in the meantime?




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