Problem karlsuss SNF 2008-01-22 17:09:01: Wafer vacuum loss error

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Thu Feb 7 08:17:34 PST 2008


I checked and run a few dummy wafers , I didnt get any wafer
loss error, Sometimes this happens when the chuck is dirty
or someone put tape over it, so it would be good  to clean
the chuck ( wipes and Isopropyl) to make sure you dont get
particles or vacuum sensor errors. 




More information about the karlsuss-pcs mailing list