Problem karlsuss SNF 2008-01-11 15:10:22: Mario did grab Z
mahnaz at snf.stanford.edu
mahnaz at snf.stanford.edu
Fri Jan 11 15:10:23 PST 2008
Mario shot two wafers and for 1 um resist with 1.4 seconds of exposure still no good. needs intensity check , i think that is low.
More information about the karlsuss-pcs
mailing list