Problem karlsuss SNF 2008-01-17 19:20:14: Alignment problems

tura at snf.stanford.edu tura at snf.stanford.edu
Thu Jan 17 19:20:15 PST 2008


I align my alignment marks to <1um misalignment but the patterns come out with ~3-5um misalignment. Machine is useless if your margin of alignment error is less than 5-6um.




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