Comment karlsuss SNF 2008-01-24 10:02:42: Exposure ok

jparker at snf.stanford.edu jparker at snf.stanford.edu
Thu Jan 24 10:02:43 PST 2008


-Exposure seems to be back to normal:
-Ran 1um 3612 (vac/1.2s), got 1.5um Lines&Spaces to clear over whole wafer. 1um lines definitely overexposed, so recommend standard 1.1s or 1.0s exposure for this thickness again.
-Ran 1.6um 3612 (vac/1.6s), got 1.5um Lines&Spaces to clear over whole wafer. 
-Did not run alignment to see tura's issue and did not run enough wafers to see nevran's issue come up.




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