Comment karlsuss SNF 2008-01-24 15:24:50: Alignment OK

closega at snf.stanford.edu closega at snf.stanford.edu
Thu Jan 24 15:24:50 PST 2008


Unlike what was reported earlier by another user, my alignment accuracy was within specs.
Alignment error < 1um, after hard contact exposure of 1um 3612.




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