From jennyhu at snf.stanford.edu Wed Sep 3 13:32:12 2008 From: jennyhu at snf.stanford.edu (jennyhu at snf.stanford.edu) Date: Wed, 3 Sep 2008 13:32:12 -0700 Subject: Problem karlsuss SNF 2008-09-03 13:32:10: Lamp Life Message-ID: Failure light is on "Lamp Life/ Power". From vilanova at snf.stanford.edu Wed Sep 3 14:39:45 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 3 Sep 2008 14:39:45 -0700 Subject: Comment karlsuss SNF 2008-09-03 14:39:45: I will do the lamp change tomorrow Message-ID: I will do the lamp change tomorrow morning , the system will be in use this afternoon. From vilanova at snf.stanford.edu Thu Sep 4 07:35:51 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Sep 2008 07:35:51 -0700 Subject: Shutdown karlsuss SNF 2008-09-04 07:35:51: monthly lamp change in progress.... Message-ID: From vilanova at snf.stanford.edu Thu Sep 4 09:13:27 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:13:27 -0700 Subject: Shutdown karlsuss SNF 2008-09-04 07:35:51: monthly lamp change in progress.... Message-ID: Lamp changed and calibrated, Intensity = 15mw/cm2 Uniformity 1% From vilanova at snf.stanford.edu Thu Sep 4 09:13:37 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:13:37 -0700 Subject: Problem karlsuss SNF 2008-09-03 13:32:10: Lamp Life Message-ID: Lamp changed and calibrated, Intensity = 15mw/cm2 Uniformity 1% From vilanova at snf.stanford.edu Thu Sep 4 09:13:44 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:13:44 -0700 Subject: Comment karlsuss SNF 2008-09-03 14:39:45: I will do the lamp change tomorrow Message-ID: Lamp changed and calibrated, Intensity = 15mw/cm2 Uniformity 1% From vilanova at snf.stanford.edu Thu Sep 4 09:13:52 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 4 Sep 2008 09:13:52 -0700 Subject: Comment karlsuss SNF 2008-06-18 07:57:31: lamp re calibration Message-ID: cleared From huimei at snf.stanford.edu Sat Sep 13 00:14:00 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Sat, 13 Sep 2008 00:14:00 -0700 Subject: Problem karlsuss SNF 2008-09-13 00:14:00: it show chunck out of range and automatically initialize Message-ID: From vilanova at snf.stanford.edu Mon Sep 15 07:29:45 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 15 Sep 2008 07:29:45 -0700 Subject: Problem karlsuss SNF 2008-09-13 00:14:00: it show chunck out of range and automatically initialize Message-ID: If you move the chuck far away from the end point the system will do that or it will stop working , if you move the chuck and you hear a beep or if you see the warning on the front panel please stop moving it and go back to home position. chuck ok now From huimei at snf.stanford.edu Tue Sep 16 05:38:08 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Tue, 16 Sep 2008 05:38:08 -0700 Subject: Problem karlsuss SNF 2008-09-16 05:38:07: chunck problem Message-ID: when press load, the wafer hit the mask and found the chunck up too much(the gap setting is 40um, it's normal) From huimei at snf.stanford.edu Tue Sep 16 05:39:09 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Tue, 16 Sep 2008 05:39:09 -0700 Subject: Problem karlsuss SNF 2008-09-16 05:39:06: chunck vacumm problem Message-ID: when load wafer,the chunck move up too much and hit the mask then the mask drop on the wafer From huimei at snf.stanford.edu Tue Sep 16 05:46:08 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Tue, 16 Sep 2008 05:46:08 -0700 Subject: Problem karlsuss SNF 2008-09-16 05:46:07: chunck move up too much and hit the mask then drop on the wafer when loading Message-ID: From vilanova at snf.stanford.edu Tue Sep 16 07:54:17 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Sep 2008 07:54:17 -0700 Subject: Problem karlsuss SNF 2008-09-16 05:38:07: chunck problem Message-ID: Exposed a wafer, I couldnt repeat the problem , the chuck and wec were working fine to me, the only thing I found was that one of the screws that holds the maskplate was lose, and for some reason ( I dont know why the exposure was left at 566.1 seconds ) From vilanova at snf.stanford.edu Tue Sep 16 07:54:29 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Sep 2008 07:54:29 -0700 Subject: Problem karlsuss SNF 2008-09-16 05:39:06: chunck vacumm problem Message-ID: Exposed a wafer, I couldnt repeat the problem , the chuck and wec were working fine to me, the only thing I found was that one of the screws that holds the maskplate was lose, and for some reason ( I dont know why the exposure was left at 566.1 seconds ) From vilanova at snf.stanford.edu Tue Sep 16 07:54:42 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 16 Sep 2008 07:54:42 -0700 Subject: Problem karlsuss SNF 2008-09-16 05:46:07: chunck move up too much and hit the mask then drop on the wafer when loading Message-ID: Exposed a wafer, I couldnt repeat the problem , the chuck and wec were working fine to me, the only thing I found was that one of the screws that holds the maskplate was lose, and for some reason ( I dont know why the exposure was left at 566.1 seconds ) From huimei at snf.stanford.edu Sun Sep 21 13:15:36 2008 From: huimei at snf.stanford.edu (huimei at snf.stanford.edu) Date: Sun, 21 Sep 2008 13:15:36 -0700 Subject: Problem karlsuss SNF 2008-09-21 13:15:35: chunck puch mask and mask drop when push load+enter Message-ID: From gsosa at snf.stanford.edu Mon Sep 22 08:36:11 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 22 Sep 2008 08:36:11 -0700 Subject: Problem karlsuss SNF 2008-09-21 13:15:35: chunck puch mask and mask drop when push load+enter Message-ID: Checked and reset the system and centered the X/Y/Z micrometers. Checked and unjambed the microscope head mechanism. Tested system- All OK. From rcordova at snf.stanford.edu Sat Sep 27 15:31:32 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sat, 27 Sep 2008 15:31:32 -0700 Subject: Problem karlsuss SNF 2008-09-27 15:31:31: Lamp power is low: Message-ID: Lamp poser is at 14.1 mw From rcordova at snf.stanford.edu Sun Sep 28 10:16:48 2008 From: rcordova at snf.stanford.edu (rcordova at snf.stanford.edu) Date: Sun, 28 Sep 2008 10:16:48 -0700 Subject: Comment karlsuss SNF 2008-09-28 10:16:47: Adding comment Message-ID: I forgot to mention that it alarms for lamp life power failure. From vilanova at snf.stanford.edu Mon Sep 29 07:55:26 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Sep 2008 07:55:26 -0700 Subject: Shutdown karlsuss SNF 2008-09-29 07:55:25: monthly lamp change.................. Message-ID: From vilanova at snf.stanford.edu Mon Sep 29 08:40:08 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Sep 2008 08:40:08 -0700 Subject: Shutdown karlsuss SNF 2008-09-29 07:55:25: monthly lamp change.................. Message-ID: monthly lamp change completed. Inbtensity = 15Mw/Cm2 Uniformity = 1.08% From vilanova at snf.stanford.edu Mon Sep 29 08:40:15 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Sep 2008 08:40:15 -0700 Subject: Problem karlsuss SNF 2008-09-27 15:31:31: Lamp power is low: Message-ID: monthly lamp change completed. Inbtensity = 15Mw/Cm2 Uniformity = 1.08% From vilanova at snf.stanford.edu Mon Sep 29 08:40:22 2008 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Mon, 29 Sep 2008 08:40:22 -0700 Subject: Comment karlsuss SNF 2008-09-28 10:16:47: Adding comment Message-ID: monthly lamp change completed. Inbtensity = 15Mw/Cm2 Uniformity = 1.08% From mahnaz at snf.stanford.edu Mon Sep 29 17:47:58 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Mon, 29 Sep 2008 17:47:58 -0700 Subject: Comment karlsuss SNF 2008-09-29 17:47:58: exposer Message-ID: I ran 3612 1 um resist and resolved 1 um line and space and 2.5 um squers. 1.1 second exposer in vac. mode. 1 um resist looks perferct as well.