From vilanova at snf.stanford.edu Fri Apr 3 07:41:59 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 3 Apr 2009 07:41:59 -0700 Subject: Shutdown karlsuss SNF 2009-04-03 07:41:58: Monthly Lamp Change In progress.... Message-ID: From vilanova at snf.stanford.edu Fri Apr 3 11:10:42 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Fri, 3 Apr 2009 11:10:42 -0700 Subject: Shutdown karlsuss SNF 2009-04-03 07:41:58: Monthly Lamp Change In progress.... Message-ID: Monthly Lamp Change Completed Intensity = 15Mw/Cm2 Uniformity = 1.6% From ericp at snf.stanford.edu Sun Apr 5 22:22:29 2009 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sun, 5 Apr 2009 22:22:29 -0700 Subject: Problem karlsuss SNF 2009-04-05 22:22:29: shutter problem ? Message-ID: UV light appears to flicker when shutter closes. From vilanova at snf.stanford.edu Tue Apr 7 11:14:52 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 7 Apr 2009 11:14:52 -0700 Subject: Comment karlsuss SNF 2009-04-07 11:14:52: Left Side WIng Shutter Message-ID: The Left Wing On the shutter still get it stuck from time to time I See people reservations ,I made reservations for tomorrow morning to finish the adjustments , The Shutter is not flickering anymore but we still have to fix the problem. From gsosa at snf.stanford.edu Wed Apr 8 12:16:09 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 8 Apr 2009 12:16:09 -0700 Subject: Comment karlsuss SNF 2009-04-08 12:16:09: Update-Shutter Problem 4/7 Message-ID: Diagnosed and determined that the shutter problem is caused by a leaking air cylinder. Was able to lube the cylinder shaft and adjust pneumatics to temporarily fix the problem. Will order and repace shutter air cylinders. System is OK to use. From gsosa at snf.stanford.edu Wed Apr 15 13:01:25 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 15 Apr 2009 13:01:25 -0700 Subject: Comment karlsuss SNF 2009-04-15 13:01:25: DUV Mirror Message-ID: The DUV cold mirror needed to convert the aligner to DUV mode is on order from Germany. The lead time is 4 to 6 weeks. We expect the mirror should be here by the end of april or 1st part of May. When we recieve the mirrorwe will coordinate a time with the user and make needed reservations. If there are any changes to the delivery schedule, we will make an update in coral. From vilanova at snf.stanford.edu Thu Apr 16 14:56:13 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 16 Apr 2009 14:56:13 -0700 Subject: Comment karlsuss SNF 2009-04-16 14:56:12: Small Chuck For Pieces Message-ID: Small Chuck for Pieces was missing Some Of the screws and washers , Replaced washers and Screws, Ok to use. From khoang at snf.stanford.edu Tue Apr 28 00:04:32 2009 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Tue, 28 Apr 2009 00:04:32 -0700 Subject: Problem karlsuss SNF 2009-04-28 00:04:32: machine hanging on at "Please wait" mode Message-ID: During a regular aligment procedure, machine suddenly changed to "Move X to the left, Move Y to the back ..." I followed the instruction on the screen, and the machine hanged. From khoang at snf.stanford.edu Tue Apr 28 00:10:48 2009 From: khoang at snf.stanford.edu (khoang at snf.stanford.edu) Date: Tue, 28 Apr 2009 00:10:48 -0700 Subject: Problem karlsuss SNF 2009-04-28 00:10:48: Hang on at "Please wait" mode Message-ID: During a regular alignment procedure, it asked me to "Move X to the left, Move Y to the back". I followed the instruction on the screen, and it said "TSA ...." and it went into "Please wait" mode. From vilanova at snf.stanford.edu Tue Apr 28 07:16:04 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Apr 2009 07:16:04 -0700 Subject: Problem karlsuss SNF 2009-04-28 00:04:32: machine hanging on at "Please wait" mode Message-ID: Re initialized System , Test MIcroscopes and Entire Stage, Ok to use From vilanova at snf.stanford.edu Tue Apr 28 07:16:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 28 Apr 2009 07:16:21 -0700 Subject: Problem karlsuss SNF 2009-04-28 00:10:48: Hang on at "Please wait" mode Message-ID: Please read previous message. From karthikv at snf.stanford.edu Tue Apr 28 21:07:45 2009 From: karthikv at snf.stanford.edu (karthikv at snf.stanford.edu) Date: Tue, 28 Apr 2009 21:07:45 -0700 Subject: Problem karlsuss SNF 2009-04-28 21:07:45: Backside alignment problems Message-ID: The backside microscope motors are having trouble moving in the left-right directions. The up-down direction seems to work fine. When you reach a certain point the machine starts beeing and showing, "HW or SW limit reached". After this happens, even if you try to move in the opposite direction to your previous motion, the same beeping and error shows up, which means you can neither move left nor right. I tried to clear the error first by moving in the up-down direction after getting an error in the left-right direction, but it still doesn't help. If you press the button multiple times the objective eventually does move to where you want it to, although it continuouslly beeps and shows the same error. It seems to happen both on the left and right objectives. From kimsangb at snf.stanford.edu Thu Apr 30 00:46:14 2009 From: kimsangb at snf.stanford.edu (kimsangb at snf.stanford.edu) Date: Thu, 30 Apr 2009 00:46:14 -0700 Subject: Problem karlsuss SNF 2009-04-30 00:46:14: Mask fell down on the wafer. Message-ID: When I pushed the 'alignment check' button, screen said "lost vacuum for mask. confirm with ok". It turns out my mask fell on my wafer. My exposure condition was Low Vacuum. From gsosa at snf.stanford.edu Thu Apr 30 10:21:00 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 30 Apr 2009 10:21:00 -0700 Subject: Problem karlsuss SNF 2009-04-30 00:46:14: Mask fell down on the wafer. Message-ID: Mask vacuum leak in vacuum supply hose. Tightened up fittings. Cleaned mask holder plate. Tested operation- All OK.