From vilanova at snf.stanford.edu Wed Feb 4 07:55:39 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 4 Feb 2009 07:55:39 -0800 Subject: Shutdown karlsuss SNF 2009-02-04 07:55:39: Monthly Lamp and calibration change in progress.... Message-ID: From vilanova at snf.stanford.edu Wed Feb 4 08:32:39 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 4 Feb 2009 08:32:39 -0800 Subject: Shutdown karlsuss SNF 2009-02-04 07:55:39: Monthly Lamp and calibration change in progress.... Message-ID: Lamp change and calibration Completed. Intensity = 15Mw/Cm2 Uniformity = 1.9% Ready to use. From helencxy at snf.stanford.edu Sun Feb 15 19:54:18 2009 From: helencxy at snf.stanford.edu (helencxy at snf.stanford.edu) Date: Sun, 15 Feb 2009 19:54:18 -0800 Subject: Problem karlsuss SNF 2009-02-15 19:54:17: Proximity mask holder missing Message-ID: The chuck refused to go into WEC when loading, and word like "Proximity maskholder missing" keeping poping up on the screen. From vilanova at snf.stanford.edu Tue Feb 17 07:52:50 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 17 Feb 2009 07:52:50 -0800 Subject: Problem karlsuss SNF 2009-02-15 19:54:17: Proximity mask holder missing Message-ID: User had it on the wrong set up MOde. From jwpchen at snf.stanford.edu Tue Feb 17 22:09:34 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 17 Feb 2009 22:09:34 -0800 Subject: Problem karlsuss SNF 2009-02-17 22:09:33: lamp life/power Message-ID: lamp life/power beep From vilanova at snf.stanford.edu Wed Feb 18 08:43:21 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Feb 2009 08:43:21 -0800 Subject: Problem karlsuss SNF 2009-02-17 22:09:33: lamp life/power Message-ID: recalibrated lamp, tested, Uniformity/Intensity /within specs No more Alamr beeps, Ok to use. From mahnaz at snf.stanford.edu Wed Feb 18 13:53:42 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 18 Feb 2009 13:53:42 -0800 Subject: Shutdown karlsuss SNF 2009-02-18 13:53:41: system is jammed Message-ID: From vilanova at snf.stanford.edu Wed Feb 18 15:28:52 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 18 Feb 2009 15:28:52 -0800 Subject: Shutdown karlsuss SNF 2009-02-18 13:53:41: system is jammed Message-ID: cleaned and Lubricated Top MIcroscope Fixture, the System was getting stuck on the bottom Due to some friction against the MIcroscope Frame, adjusted Frame, and checked MIcroscope movement ( Up / Down ) Exposed a wafer ( to make sure the System was not getting Stuck while in exposure motion ) Ok to use. From faridz at snf.stanford.edu Wed Feb 18 18:01:35 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Wed, 18 Feb 2009 18:01:35 -0800 Subject: Problem karlsuss SNF 2009-02-18 18:01:35: out of focus cant align Message-ID: From vilanova at snf.stanford.edu Thu Feb 19 10:01:11 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Thu, 19 Feb 2009 10:01:11 -0800 Subject: Problem karlsuss SNF 2009-02-18 18:01:35: out of focus cant align Message-ID: The Focus Knob was All the way out , I moved it back to normal position and Focus was working Fine, ok to use. From kenney at snf.stanford.edu Thu Feb 19 13:17:06 2009 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Thu, 19 Feb 2009 13:17:06 -0800 Subject: Problem karlsuss SNF 2009-02-19 13:17:06: Unable to focus on mask Message-ID: with mask metal side correctly positioned I could not focus on the mask by using the top knob or the fine control knobs I tried a second mask, which has worked many times before to check if the mask plate was thinner than normal with the same result. The TOP/BOTTOM light was lit. Thanks From gsosa at snf.stanford.edu Thu Feb 19 15:07:34 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 19 Feb 2009 15:07:34 -0800 Subject: Problem karlsuss SNF 2009-02-19 13:17:06: Unable to focus on mask Message-ID: Checked focus system with test mask. Unable to get clear focus with coarse focus knob( Run out of travel). Determined that the microscope head was dropping too low. Checked and adjusted the hardstop position of the microscope when in the lower position. There is now enough travel in the microscope head to move through best focus . Tested left/right fine focus knobs. All OK. System ready for use. From kenney at snf.stanford.edu Fri Feb 20 13:14:22 2009 From: kenney at snf.stanford.edu (kenney at snf.stanford.edu) Date: Fri, 20 Feb 2009 13:14:22 -0800 Subject: Shutdown karlsuss SNF 2009-02-20 13:14:21: System seems locked up Message-ID: Screen states "watch out!" and the system is completely unresponsive. It looks like the stage has been moved out of tolerance - maybe. Perhaps it needs a reboot? Thanks From gsosa at snf.stanford.edu Fri Feb 20 16:13:28 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 20 Feb 2009 16:13:28 -0800 Subject: Shutdown karlsuss SNF 2009-02-20 13:14:21: System seems locked up Message-ID: The X and Y stages were out of range. Adjusted micrometers to center of travel to center the stages. System initialized OK. Also removed front shroud because microscope was rubbing up against it when moving up/down. Tested system. OK to use . Woll work on the panel problem next week. System OK to use. From jwpchen at snf.stanford.edu Tue Feb 24 00:29:07 2009 From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu) Date: Tue, 24 Feb 2009 00:29:07 -0800 Subject: Problem karlsuss SNF 2009-02-24 00:29:06: please wait Message-ID: machine says, please wait From vilanova at snf.stanford.edu Tue Feb 24 07:35:35 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 24 Feb 2009 07:35:35 -0800 Subject: Problem karlsuss SNF 2009-02-24 00:29:06: please wait Message-ID: Re InItIaLiZeD system, tested microscope MOvement up/Down, Ok To UsE From jcbowlby at snf.stanford.edu Tue Feb 24 16:05:33 2009 From: jcbowlby at snf.stanford.edu (jcbowlby at snf.stanford.edu) Date: Tue, 24 Feb 2009 16:05:33 -0800 Subject: Problem karlsuss SNF 2009-02-24 16:05:33: karlsuss Message-ID: loss of mask vacuum - would not let us continue From jcbowlby at snf.stanford.edu Tue Feb 24 16:45:50 2009 From: jcbowlby at snf.stanford.edu (jcbowlby at snf.stanford.edu) Date: Tue, 24 Feb 2009 16:45:50 -0800 Subject: Comment karlsuss SNF 2009-02-24 16:45:49: previous entry Message-ID: The instrument was fine. I had tape on the back side of the quartz plate holding my film. Sorry for my confusion. From faridz at snf.stanford.edu Tue Feb 24 18:00:51 2009 From: faridz at snf.stanford.edu (faridz at snf.stanford.edu) Date: Tue, 24 Feb 2009 18:00:51 -0800 Subject: Problem karlsuss SNF 2009-02-24 18:00:50: sw failed to intaiolez Message-ID: previous user trun off power cant start software! From cbaxter at snf.stanford.edu Tue Feb 24 18:54:50 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 24 Feb 2009 18:54:50 -0800 Subject: Problem karlsuss SNF 2009-02-24 18:00:50: sw failed to intaiolez Message-ID: With Mario's help, initialized system. .. From cbaxter at snf.stanford.edu Tue Feb 24 18:55:07 2009 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 24 Feb 2009 18:55:07 -0800 Subject: Problem karlsuss SNF 2009-02-24 16:05:33: karlsuss Message-ID: From vilanova at snf.stanford.edu Wed Feb 25 07:13:24 2009 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Wed, 25 Feb 2009 07:13:24 -0800 Subject: Comment karlsuss SNF 2009-02-24 16:45:49: previous entry Message-ID: Checked System Calibration , System working Fine Thanks! Cesar!!!! :-)