Shutdown karlsuss SNF 2009-02-18 13:53:41: system is jammed

vilanova at snf.stanford.edu vilanova at snf.stanford.edu
Wed Feb 18 15:28:52 PST 2009


cleaned and Lubricated  Top MIcroscope Fixture, the System 
was getting stuck on the bottom Due to some friction against
the MIcroscope Frame, adjusted Frame,  and checked
MIcroscope movement ( Up / Down ) Exposed a wafer  ( to 
make sure the  System was not getting Stuck while in 
exposure motion ) Ok to use. 




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