Shutdown karlsuss SNF 2009-02-18 13:53:41: system is jammed

[vilanova at snf.stanford.edu]

cleaned and Lubricated  Top MIcroscope Fixture, the System 
was getting stuck on the bottom Due to some friction against
the MIcroscope Frame, adjusted Frame,  and checked
MIcroscope movement ( Up / Down ) Exposed a wafer  ( to 
make sure the  System was not getting Stuck while in 
exposure motion ) Ok to use.